Micromachined flow sensor for fuel injection

Yoshitaka Kanai, Jun Mizuno, Kay Nottmeyer, Takashi Kobayashi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Citations (Scopus)

Abstract

This paper presents the structure, operation principle, and fabrication process of a novel type of flow-velocity sensor. Like the well known classical Pitot (Prandtl) tube, it realizes flow velocity detection by measurement of the pressure difference between stagnant fluid pressure in front of the sensor and static pressure in the flow around the sensor. This difference results in a deflection of a diaphragm suspended boss, that serves as the counter electrode of an integrated capacitor which is directly exposed to the fluid to be measured. Experimental results in the wind tunnel and in the gasoline direct injection experimental set-up confirm the sensor's operation principle and show good time response.

Original languageEnglish
Title of host publicationSAE Technical Papers
DOIs
Publication statusPublished - 2000
Externally publishedYes
EventSAE 2000 World Congress - Detroit, MI
Duration: 2000 Mar 62000 Mar 9

Other

OtherSAE 2000 World Congress
CityDetroit, MI
Period00/3/600/3/9

Fingerprint

Fuel injection
Sensors
Flow velocity
Fluids
Direct injection
Diaphragms
Wind tunnels
Gasoline
Capacitors
Fabrication
Electrodes

Keywords

  • air flow
  • Bosch-type flow rate meter
  • flow sensor
  • fuel injection
  • liquid flow
  • micromachine
  • silicon

ASJC Scopus subject areas

  • Automotive Engineering
  • Safety, Risk, Reliability and Quality
  • Pollution
  • Industrial and Manufacturing Engineering

Cite this

Kanai, Y., Mizuno, J., Nottmeyer, K., & Kobayashi, T. (2000). Micromachined flow sensor for fuel injection. In SAE Technical Papers https://doi.org/10.4271/2000-01-1365

Micromachined flow sensor for fuel injection. / Kanai, Yoshitaka; Mizuno, Jun; Nottmeyer, Kay; Kobayashi, Takashi.

SAE Technical Papers. 2000.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Kanai, Y, Mizuno, J, Nottmeyer, K & Kobayashi, T 2000, Micromachined flow sensor for fuel injection. in SAE Technical Papers. SAE 2000 World Congress, Detroit, MI, 00/3/6. https://doi.org/10.4271/2000-01-1365
Kanai Y, Mizuno J, Nottmeyer K, Kobayashi T. Micromachined flow sensor for fuel injection. In SAE Technical Papers. 2000 https://doi.org/10.4271/2000-01-1365
Kanai, Yoshitaka ; Mizuno, Jun ; Nottmeyer, Kay ; Kobayashi, Takashi. / Micromachined flow sensor for fuel injection. SAE Technical Papers. 2000.
@inproceedings{62a3df988ab34ac48b8bc729e2f350a3,
title = "Micromachined flow sensor for fuel injection",
abstract = "This paper presents the structure, operation principle, and fabrication process of a novel type of flow-velocity sensor. Like the well known classical Pitot (Prandtl) tube, it realizes flow velocity detection by measurement of the pressure difference between stagnant fluid pressure in front of the sensor and static pressure in the flow around the sensor. This difference results in a deflection of a diaphragm suspended boss, that serves as the counter electrode of an integrated capacitor which is directly exposed to the fluid to be measured. Experimental results in the wind tunnel and in the gasoline direct injection experimental set-up confirm the sensor's operation principle and show good time response.",
keywords = "air flow, Bosch-type flow rate meter, flow sensor, fuel injection, liquid flow, micromachine, silicon",
author = "Yoshitaka Kanai and Jun Mizuno and Kay Nottmeyer and Takashi Kobayashi",
year = "2000",
doi = "10.4271/2000-01-1365",
language = "English",
booktitle = "SAE Technical Papers",

}

TY - GEN

T1 - Micromachined flow sensor for fuel injection

AU - Kanai, Yoshitaka

AU - Mizuno, Jun

AU - Nottmeyer, Kay

AU - Kobayashi, Takashi

PY - 2000

Y1 - 2000

N2 - This paper presents the structure, operation principle, and fabrication process of a novel type of flow-velocity sensor. Like the well known classical Pitot (Prandtl) tube, it realizes flow velocity detection by measurement of the pressure difference between stagnant fluid pressure in front of the sensor and static pressure in the flow around the sensor. This difference results in a deflection of a diaphragm suspended boss, that serves as the counter electrode of an integrated capacitor which is directly exposed to the fluid to be measured. Experimental results in the wind tunnel and in the gasoline direct injection experimental set-up confirm the sensor's operation principle and show good time response.

AB - This paper presents the structure, operation principle, and fabrication process of a novel type of flow-velocity sensor. Like the well known classical Pitot (Prandtl) tube, it realizes flow velocity detection by measurement of the pressure difference between stagnant fluid pressure in front of the sensor and static pressure in the flow around the sensor. This difference results in a deflection of a diaphragm suspended boss, that serves as the counter electrode of an integrated capacitor which is directly exposed to the fluid to be measured. Experimental results in the wind tunnel and in the gasoline direct injection experimental set-up confirm the sensor's operation principle and show good time response.

KW - air flow

KW - Bosch-type flow rate meter

KW - flow sensor

KW - fuel injection

KW - liquid flow

KW - micromachine

KW - silicon

UR - http://www.scopus.com/inward/record.url?scp=84877429854&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84877429854&partnerID=8YFLogxK

U2 - 10.4271/2000-01-1365

DO - 10.4271/2000-01-1365

M3 - Conference contribution

BT - SAE Technical Papers

ER -