Micromachined flow sensor for fuel injection

Yoshitaka Kanai*, Jun Mizuno, Kay Nottmeyer, Takashi Kobayashi

*Corresponding author for this work

Research output: Contribution to journalConference articlepeer-review

3 Citations (Scopus)


This paper presents the structure, operation principle, and fabrication process of a novel type of flow-velocity sensor. Like the well known classical Pitot (Prandtl) tube, it realizes flow velocity detection by measurement of the pressure difference between stagnant fluid pressure in front of the sensor and static pressure in the flow around the sensor. This difference results in a deflection of a diaphragm suspended boss, that serves as the counter electrode of an integrated capacitor which is directly exposed to the fluid to be measured. Experimental results in the wind tunnel and in the gasoline direct injection experimental set-up confirm the sensor's operation principle and show good time response.

Original languageEnglish
JournalSAE Technical Papers
Publication statusPublished - 2000
Externally publishedYes
EventSAE 2000 World Congress - Detroit, MI, United States
Duration: 2000 Mar 62000 Mar 9


  • Bosch-type flow rate meter
  • air flow
  • flow sensor
  • fuel injection
  • liquid flow
  • micromachine
  • silicon

ASJC Scopus subject areas

  • Automotive Engineering
  • Safety, Risk, Reliability and Quality
  • Pollution
  • Industrial and Manufacturing Engineering


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