Micromachining

Shuichi Shoji, M. Esashi

Research output: Contribution to journalArticle

Abstract

In order to fabricate circuit integrated microsensors, micro fabrication techniques based on LSI technologies, that micro-machining, play important roles. In this section useful micro-machining techniques for fabricating integrated sensors are described. The micropackaged structure for integrated sensors is also introduced.

Original languageEnglish
Pages (from-to)47-57
Number of pages11
JournalHandbook of Sensors and Actuators
Volume3
DOIs
Publication statusPublished - 1996
Externally publishedYes

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Micromachining
micromachining
machining
Machining
Microsensors
large scale integration
Microfabrication
sensors
Sensors
integrated circuits
Integrated circuits
fabrication

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Electrical and Electronic Engineering
  • Instrumentation

Cite this

Micromachining. / Shoji, Shuichi; Esashi, M.

In: Handbook of Sensors and Actuators, Vol. 3, 1996, p. 47-57.

Research output: Contribution to journalArticle

Shoji, Shuichi ; Esashi, M. / Micromachining. In: Handbook of Sensors and Actuators. 1996 ; Vol. 3. pp. 47-57.
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