Micromachining

S. Shoji, M. Esashi

Research output: Contribution to journalArticle

Abstract

In order to fabricate circuit integrated microsensors, micro fabrication techniques based on LSI technologies, that micro-machining, play important roles. In this section useful micro-machining techniques for fabricating integrated sensors are described. The micropackaged structure for integrated sensors is also introduced.

Original languageEnglish
Pages (from-to)47-57
Number of pages11
JournalHandbook of Sensors and Actuators
Volume3
DOIs
Publication statusPublished - 1996 Dec 1
Externally publishedYes

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Instrumentation
  • Electrical and Electronic Engineering

Fingerprint Dive into the research topics of 'Micromachining'. Together they form a unique fingerprint.

  • Cite this