Micromechanical Characterization of Self-Oscillating Microcantilever Using Piezoresistive Microsensors

Jeung Sang Go, Shuichi Shoji

    Research output: Contribution to journalArticle

    Abstract

    The flow-induced vibration of the microcantilever is investigated. In particular, to avoid flow disturbance resulting from size of measuring probe, we use the monolithic boron-doped piezoresistive microsensors. By characterizing the dynamic behavior of the microcantilever, the new micromechanics is experimentally determined, completely different from the conventional mechanics in the flow-induced vibration.

    Original languageEnglish
    Pages (from-to)510-512
    Number of pages3
    JournalIEEJ Transactions on Sensors and Micromachines
    Volume123
    Issue number11
    DOIs
    Publication statusPublished - 2003

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    Keywords

    • flow-induced vibration
    • microcantilever
    • natural frequency
    • piezoresistive sensor
    • vortex shedding

    ASJC Scopus subject areas

    • Mechanical Engineering
    • Electrical and Electronic Engineering

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