Micromechanical Characterization of Self-Oscillating Microcantilever Using Piezoresistive Microsensors

Jeung Sang Go, Shuichi Shoji

Research output: Contribution to journalArticlepeer-review

Abstract

The flow-induced vibration of the microcantilever is investigated. In particular, to avoid flow disturbance resulting from size of measuring probe, we use the monolithic boron-doped piezoresistive microsensors. By characterizing the dynamic behavior of the microcantilever, the new micromechanics is experimentally determined, completely different from the conventional mechanics in the flow-induced vibration.

Original languageEnglish
Pages (from-to)510-512
Number of pages3
Journalieej transactions on sensors and micromachines
Volume123
Issue number11
DOIs
Publication statusPublished - 2003

Keywords

  • flow-induced vibration
  • microcantilever
  • natural frequency
  • piezoresistive sensor
  • vortex shedding

ASJC Scopus subject areas

  • Mechanical Engineering
  • Electrical and Electronic Engineering

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