Micromechanical Characterization of Self-Oscillating Microcantilever Using Piezoresistive Microsensors

Jeung Sang Go, Shuichi Shoji

    Research output: Contribution to journalArticle

    Abstract

    The flow-induced vibration of the microcantilever is investigated. In particular, to avoid flow disturbance resulting from size of measuring probe, we use the monolithic boron-doped piezoresistive microsensors. By characterizing the dynamic behavior of the microcantilever, the new micromechanics is experimentally determined, completely different from the conventional mechanics in the flow-induced vibration.

    Original languageEnglish
    Pages (from-to)510-512
    Number of pages3
    JournalIEEJ Transactions on Sensors and Micromachines
    Volume123
    Issue number11
    DOIs
    Publication statusPublished - 2003

    Fingerprint

    Microsensors
    Micromechanics
    Boron
    Mechanics

    Keywords

    • flow-induced vibration
    • microcantilever
    • natural frequency
    • piezoresistive sensor
    • vortex shedding

    ASJC Scopus subject areas

    • Mechanical Engineering
    • Electrical and Electronic Engineering

    Cite this

    Micromechanical Characterization of Self-Oscillating Microcantilever Using Piezoresistive Microsensors. / Go, Jeung Sang; Shoji, Shuichi.

    In: IEEJ Transactions on Sensors and Micromachines, Vol. 123, No. 11, 2003, p. 510-512.

    Research output: Contribution to journalArticle

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