Micro/nanofabrication of poly(L-lactic acid) using focused ion beam direct etching

Tomoko Gowa Oyama; Toru Hinata; Naotsugu Nagasawa; Akihiro Oshima; Masakazu Washio; Seiichi Tagawa; Mitsumasa Taguchi

doi:10.1063/1.4825277

Micro/nanofabrication of poly(_L-lactic acid) using focused ion beam direct etching

Tomoko Gowa Oyama, Toru Hinata, Naotsugu Nagasawa, Akihiro Oshima, Masakazu Washio, Seiichi Tagawa, Mitsumasa Taguchi

School of Advanced Science and Engineering

Research output: Contribution to journal › Article › peer-review

12 Citations (Scopus)

Abstract

Micro/nanofabrication of biocompatible and biodegradable poly( _L-lactic acid) (PLLA) using focused Ga ion beam direct etching was evaluated for future bio-device applications. The fabrication performance was determined with different ion fluences and fluxes (beam currents), and it was found that the etching speed and fabrication accuracy were affected by irradiation-induced heat. Focused ion beam (FIB)-irradiated surfaces were analyzed using micro-area X-ray photoelectron spectroscopy. Owing to reactions such as the physical sputtering of atoms and radiation-induced decomposition, PLLA was gradually carbonized with increasing C=C bonds. Controlled micro/nanostructures of PLLA were fabricated with C=C bond-rich surfaces expected to have good cell attachment properties.

Original language	English
Article number	163105
Journal	Applied Physics Letters
Volume	103
Issue number	16
DOIs	https://doi.org/10.1063/1.4825277
Publication status	Published - 2013 Oct 14

ASJC Scopus subject areas

Physics and Astronomy (miscellaneous)

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title = "Micro/nanofabrication of poly(L-lactic acid) using focused ion beam direct etching",

abstract = "Micro/nanofabrication of biocompatible and biodegradable poly( L-lactic acid) (PLLA) using focused Ga ion beam direct etching was evaluated for future bio-device applications. The fabrication performance was determined with different ion fluences and fluxes (beam currents), and it was found that the etching speed and fabrication accuracy were affected by irradiation-induced heat. Focused ion beam (FIB)-irradiated surfaces were analyzed using micro-area X-ray photoelectron spectroscopy. Owing to reactions such as the physical sputtering of atoms and radiation-induced decomposition, PLLA was gradually carbonized with increasing C=C bonds. Controlled micro/nanostructures of PLLA were fabricated with C=C bond-rich surfaces expected to have good cell attachment properties.",

author = "Oyama, {Tomoko Gowa} and Toru Hinata and Naotsugu Nagasawa and Akihiro Oshima and Masakazu Washio and Seiichi Tagawa and Mitsumasa Taguchi",

note = "Funding Information: The authors would like to thank Mr. Satoshi Okubo (Waseda University) for his fruitful discussion and Ms. Miki Kashiwakura for her technical support. T.G.O. acknowledges a Grant-in-Aid for JSPS Fellows 24-9069. N.N. acknowledges a Grant-in-Aid for Scientific Research (C) 24510132. A part of this work was supported by the Cooperative Research Programs entitled “Network Joint Research Center for Materials and Devices” (2012257), “Nanotechnology Platform Project (Nanotechnology Open Facilities in Osaka University)” (F-12-OS-0026 and F-13-OS-0023), organized by the Ministry of Education, Culture, Sports, Science and Technology, Japan.",

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doi = "10.1063/1.4825277",

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AU - Oyama, Tomoko Gowa

AU - Hinata, Toru

AU - Nagasawa, Naotsugu

AU - Oshima, Akihiro

AU - Washio, Masakazu

AU - Tagawa, Seiichi

AU - Taguchi, Mitsumasa

N1 - Funding Information: The authors would like to thank Mr. Satoshi Okubo (Waseda University) for his fruitful discussion and Ms. Miki Kashiwakura for her technical support. T.G.O. acknowledges a Grant-in-Aid for JSPS Fellows 24-9069. N.N. acknowledges a Grant-in-Aid for Scientific Research (C) 24510132. A part of this work was supported by the Cooperative Research Programs entitled “Network Joint Research Center for Materials and Devices” (2012257), “Nanotechnology Platform Project (Nanotechnology Open Facilities in Osaka University)” (F-12-OS-0026 and F-13-OS-0023), organized by the Ministry of Education, Culture, Sports, Science and Technology, Japan.

PY - 2013/10/14

Y1 - 2013/10/14

N2 - Micro/nanofabrication of biocompatible and biodegradable poly( L-lactic acid) (PLLA) using focused Ga ion beam direct etching was evaluated for future bio-device applications. The fabrication performance was determined with different ion fluences and fluxes (beam currents), and it was found that the etching speed and fabrication accuracy were affected by irradiation-induced heat. Focused ion beam (FIB)-irradiated surfaces were analyzed using micro-area X-ray photoelectron spectroscopy. Owing to reactions such as the physical sputtering of atoms and radiation-induced decomposition, PLLA was gradually carbonized with increasing C=C bonds. Controlled micro/nanostructures of PLLA were fabricated with C=C bond-rich surfaces expected to have good cell attachment properties.

AB - Micro/nanofabrication of biocompatible and biodegradable poly( L-lactic acid) (PLLA) using focused Ga ion beam direct etching was evaluated for future bio-device applications. The fabrication performance was determined with different ion fluences and fluxes (beam currents), and it was found that the etching speed and fabrication accuracy were affected by irradiation-induced heat. Focused ion beam (FIB)-irradiated surfaces were analyzed using micro-area X-ray photoelectron spectroscopy. Owing to reactions such as the physical sputtering of atoms and radiation-induced decomposition, PLLA was gradually carbonized with increasing C=C bonds. Controlled micro/nanostructures of PLLA were fabricated with C=C bond-rich surfaces expected to have good cell attachment properties.

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Micro/nanofabrication of poly(_L-lactic acid) using focused ion beam direct etching

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