Micro/nanofabrication of poly(L-lactic acid) using focused ion beam direct etching

Tomoko Gowa Oyama, Toru Hinata, Naotsugu Nagasawa, Akihiro Oshima, Masakazu Washio, Seiichi Tagawa, Mitsumasa Taguchi

    Research output: Contribution to journalArticle

    8 Citations (Scopus)

    Abstract

    Micro/nanofabrication of biocompatible and biodegradable poly( L-lactic acid) (PLLA) using focused Ga ion beam direct etching was evaluated for future bio-device applications. The fabrication performance was determined with different ion fluences and fluxes (beam currents), and it was found that the etching speed and fabrication accuracy were affected by irradiation-induced heat. Focused ion beam (FIB)-irradiated surfaces were analyzed using micro-area X-ray photoelectron spectroscopy. Owing to reactions such as the physical sputtering of atoms and radiation-induced decomposition, PLLA was gradually carbonized with increasing C=C bonds. Controlled micro/nanostructures of PLLA were fabricated with C=C bond-rich surfaces expected to have good cell attachment properties.

    Original languageEnglish
    Article number163105
    JournalApplied Physics Letters
    Volume103
    Issue number16
    DOIs
    Publication statusPublished - 2013 Oct 14

    Fingerprint

    lactic acid
    nanofabrication
    ion beams
    etching
    fabrication
    beam currents
    attachment
    fluence
    sputtering
    photoelectron spectroscopy
    decomposition
    heat
    irradiation
    radiation
    cells
    atoms
    ions
    x rays

    ASJC Scopus subject areas

    • Physics and Astronomy (miscellaneous)

    Cite this

    Oyama, T. G., Hinata, T., Nagasawa, N., Oshima, A., Washio, M., Tagawa, S., & Taguchi, M. (2013). Micro/nanofabrication of poly(L-lactic acid) using focused ion beam direct etching. Applied Physics Letters, 103(16), [163105]. https://doi.org/10.1063/1.4825277

    Micro/nanofabrication of poly(L-lactic acid) using focused ion beam direct etching. / Oyama, Tomoko Gowa; Hinata, Toru; Nagasawa, Naotsugu; Oshima, Akihiro; Washio, Masakazu; Tagawa, Seiichi; Taguchi, Mitsumasa.

    In: Applied Physics Letters, Vol. 103, No. 16, 163105, 14.10.2013.

    Research output: Contribution to journalArticle

    Oyama, TG, Hinata, T, Nagasawa, N, Oshima, A, Washio, M, Tagawa, S & Taguchi, M 2013, 'Micro/nanofabrication of poly(L-lactic acid) using focused ion beam direct etching', Applied Physics Letters, vol. 103, no. 16, 163105. https://doi.org/10.1063/1.4825277
    Oyama, Tomoko Gowa ; Hinata, Toru ; Nagasawa, Naotsugu ; Oshima, Akihiro ; Washio, Masakazu ; Tagawa, Seiichi ; Taguchi, Mitsumasa. / Micro/nanofabrication of poly(L-lactic acid) using focused ion beam direct etching. In: Applied Physics Letters. 2013 ; Vol. 103, No. 16.
    @article{ff01832f202f48079c8f4ab1690cb566,
    title = "Micro/nanofabrication of poly(L-lactic acid) using focused ion beam direct etching",
    abstract = "Micro/nanofabrication of biocompatible and biodegradable poly( L-lactic acid) (PLLA) using focused Ga ion beam direct etching was evaluated for future bio-device applications. The fabrication performance was determined with different ion fluences and fluxes (beam currents), and it was found that the etching speed and fabrication accuracy were affected by irradiation-induced heat. Focused ion beam (FIB)-irradiated surfaces were analyzed using micro-area X-ray photoelectron spectroscopy. Owing to reactions such as the physical sputtering of atoms and radiation-induced decomposition, PLLA was gradually carbonized with increasing C=C bonds. Controlled micro/nanostructures of PLLA were fabricated with C=C bond-rich surfaces expected to have good cell attachment properties.",
    author = "Oyama, {Tomoko Gowa} and Toru Hinata and Naotsugu Nagasawa and Akihiro Oshima and Masakazu Washio and Seiichi Tagawa and Mitsumasa Taguchi",
    year = "2013",
    month = "10",
    day = "14",
    doi = "10.1063/1.4825277",
    language = "English",
    volume = "103",
    journal = "Applied Physics Letters",
    issn = "0003-6951",
    publisher = "American Institute of Physics Publising LLC",
    number = "16",

    }

    TY - JOUR

    T1 - Micro/nanofabrication of poly(L-lactic acid) using focused ion beam direct etching

    AU - Oyama, Tomoko Gowa

    AU - Hinata, Toru

    AU - Nagasawa, Naotsugu

    AU - Oshima, Akihiro

    AU - Washio, Masakazu

    AU - Tagawa, Seiichi

    AU - Taguchi, Mitsumasa

    PY - 2013/10/14

    Y1 - 2013/10/14

    N2 - Micro/nanofabrication of biocompatible and biodegradable poly( L-lactic acid) (PLLA) using focused Ga ion beam direct etching was evaluated for future bio-device applications. The fabrication performance was determined with different ion fluences and fluxes (beam currents), and it was found that the etching speed and fabrication accuracy were affected by irradiation-induced heat. Focused ion beam (FIB)-irradiated surfaces were analyzed using micro-area X-ray photoelectron spectroscopy. Owing to reactions such as the physical sputtering of atoms and radiation-induced decomposition, PLLA was gradually carbonized with increasing C=C bonds. Controlled micro/nanostructures of PLLA were fabricated with C=C bond-rich surfaces expected to have good cell attachment properties.

    AB - Micro/nanofabrication of biocompatible and biodegradable poly( L-lactic acid) (PLLA) using focused Ga ion beam direct etching was evaluated for future bio-device applications. The fabrication performance was determined with different ion fluences and fluxes (beam currents), and it was found that the etching speed and fabrication accuracy were affected by irradiation-induced heat. Focused ion beam (FIB)-irradiated surfaces were analyzed using micro-area X-ray photoelectron spectroscopy. Owing to reactions such as the physical sputtering of atoms and radiation-induced decomposition, PLLA was gradually carbonized with increasing C=C bonds. Controlled micro/nanostructures of PLLA were fabricated with C=C bond-rich surfaces expected to have good cell attachment properties.

    UR - http://www.scopus.com/inward/record.url?scp=84886378542&partnerID=8YFLogxK

    UR - http://www.scopus.com/inward/citedby.url?scp=84886378542&partnerID=8YFLogxK

    U2 - 10.1063/1.4825277

    DO - 10.1063/1.4825277

    M3 - Article

    VL - 103

    JO - Applied Physics Letters

    JF - Applied Physics Letters

    SN - 0003-6951

    IS - 16

    M1 - 163105

    ER -