Micro/nanofabrication of poly(L-lactic acid) using focused ion beam direct etching

Tomoko Gowa Oyama, Toru Hinata, Naotsugu Nagasawa, Akihiro Oshima, Masakazu Washio, Seiichi Tagawa, Mitsumasa Taguchi

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Micro/nanofabrication of biocompatible and biodegradable poly( L-lactic acid) (PLLA) using focused Ga ion beam direct etching was evaluated for future bio-device applications. The fabrication performance was determined with different ion fluences and fluxes (beam currents), and it was found that the etching speed and fabrication accuracy were affected by irradiation-induced heat. Focused ion beam (FIB)-irradiated surfaces were analyzed using micro-area X-ray photoelectron spectroscopy. Owing to reactions such as the physical sputtering of atoms and radiation-induced decomposition, PLLA was gradually carbonized with increasing C=C bonds. Controlled micro/nanostructures of PLLA were fabricated with C=C bond-rich surfaces expected to have good cell attachment properties.

Original languageEnglish
Article number163105
JournalApplied Physics Letters
Issue number16
Publication statusPublished - 2013 Oct 14

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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    Oyama, T. G., Hinata, T., Nagasawa, N., Oshima, A., Washio, M., Tagawa, S., & Taguchi, M. (2013). Micro/nanofabrication of poly(L-lactic acid) using focused ion beam direct etching. Applied Physics Letters, 103(16), [163105]. https://doi.org/10.1063/1.4825277