Micropump and sample-injector for integrated chemical analyzing systems

Shuichi Shoji; Shigeru Nakagawa; Masayoshi Esashi

doi:10.1016/0924-4247(90)85036-4

Micropump and sample-injector for integrated chemical analyzing systems

Shuichi Shoji, Shigeru Nakagawa, Masayoshi Esashi

Research output: Contribution to journal › Article › peer-review

129 Citations (Scopus)

Abstract

A dual pump and a buffer pump have been integrated on a silicon wafer for chemical analyzing systems. These pumps realize constant and rippleless liquid flow of a small volume. The controllable flow rate of the pumps was up to about 40 μl/min and the maximum pumping pressure was about 1 mH₂O. A sample injector made up of two three-way valves has also been fabricated with micromachining.

Original language	English
Pages (from-to)	189-192
Number of pages	4
Journal	Sensors and Actuators: A. Physical
Volume	21
Issue number	1-3
DOIs	https://doi.org/10.1016/0924-4247(90)85036-4
Publication status	Published - 1990 Feb
Externally published	Yes

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Instrumentation
Condensed Matter Physics
Surfaces, Coatings and Films
Metals and Alloys
Electrical and Electronic Engineering

Access to Document

10.1016/0924-4247(90)85036-4

Cite this

@article{2d3e7a439cab456395b0d5135fbd590f,

title = "Micropump and sample-injector for integrated chemical analyzing systems",

abstract = "A dual pump and a buffer pump have been integrated on a silicon wafer for chemical analyzing systems. These pumps realize constant and rippleless liquid flow of a small volume. The controllable flow rate of the pumps was up to about 40 μl/min and the maximum pumping pressure was about 1 mH2O. A sample injector made up of two three-way valves has also been fabricated with micromachining.",

author = "Shuichi Shoji and Shigeru Nakagawa and Masayoshi Esashi",

year = "1990",

month = feb,

doi = "10.1016/0924-4247(90)85036-4",

language = "English",

volume = "21",

pages = "189--192",

journal = "Sensors and Actuators, A: Physical",

issn = "0924-4247",

publisher = "Elsevier",

number = "1-3",

}

TY - JOUR

T1 - Micropump and sample-injector for integrated chemical analyzing systems

AU - Shoji, Shuichi

AU - Nakagawa, Shigeru

AU - Esashi, Masayoshi

PY - 1990/2

Y1 - 1990/2

N2 - A dual pump and a buffer pump have been integrated on a silicon wafer for chemical analyzing systems. These pumps realize constant and rippleless liquid flow of a small volume. The controllable flow rate of the pumps was up to about 40 μl/min and the maximum pumping pressure was about 1 mH2O. A sample injector made up of two three-way valves has also been fabricated with micromachining.

AB - A dual pump and a buffer pump have been integrated on a silicon wafer for chemical analyzing systems. These pumps realize constant and rippleless liquid flow of a small volume. The controllable flow rate of the pumps was up to about 40 μl/min and the maximum pumping pressure was about 1 mH2O. A sample injector made up of two three-way valves has also been fabricated with micromachining.

UR - http://www.scopus.com/inward/record.url?scp=0025698078&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0025698078&partnerID=8YFLogxK

U2 - 10.1016/0924-4247(90)85036-4

DO - 10.1016/0924-4247(90)85036-4

M3 - Article

AN - SCOPUS:0025698078

VL - 21

SP - 189

EP - 192

JO - Sensors and Actuators, A: Physical

JF - Sensors and Actuators, A: Physical

SN - 0924-4247

IS - 1-3

ER -

Micropump and sample-injector for integrated chemical analyzing systems

Abstract

ASJC Scopus subject areas

Access to Document

Other files and links

Fingerprint

Cite this