Abstract
A dual pump and a buffer pump have been integrated on a silicon wafer for chemical analyzing systems. These pumps realize constant and rippleless liquid flow of a small volume. The controllable flow rate of the pumps was up to about 40 μl/min and the maximum pumping pressure was about 1 mH2O. A sample injector made up of two three-way valves has also been fabricated with micromachining.
Original language | English |
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Pages (from-to) | 189-192 |
Number of pages | 4 |
Journal | Sensors and Actuators: A. Physical |
Volume | 21 |
Issue number | 1-3 |
DOIs | |
Publication status | Published - 1990 Feb |
Externally published | Yes |
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Instrumentation
- Condensed Matter Physics
- Surfaces, Coatings and Films
- Metals and Alloys
- Electrical and Electronic Engineering