Micropump and sample-injector for integrated chemical analyzing systems

Shuichi Shoji*, Shigeru Nakagawa, Masayoshi Esashi

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

138 Citations (Scopus)


A dual pump and a buffer pump have been integrated on a silicon wafer for chemical analyzing systems. These pumps realize constant and rippleless liquid flow of a small volume. The controllable flow rate of the pumps was up to about 40 μl/min and the maximum pumping pressure was about 1 mH2O. A sample injector made up of two three-way valves has also been fabricated with micromachining.

Original languageEnglish
Pages (from-to)189-192
Number of pages4
JournalSensors and Actuators: A. Physical
Issue number1-3
Publication statusPublished - 1990 Feb
Externally publishedYes

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering


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