Micropump and sample-injector for integrated chemical analyzing systems

Shuichi Shoji; Shigeru Nakagawa; Masayoshi Esashi

doi:10.1016/0924-4247(90)85036-4

Micropump and sample-injector for integrated chemical analyzing systems

Shuichi Shoji, Shigeru Nakagawa, Masayoshi Esashi

Research output: Contribution to journal › Article › peer-review

127 Citations (Scopus)

Abstract

A dual pump and a buffer pump have been integrated on a silicon wafer for chemical analyzing systems. These pumps realize constant and rippleless liquid flow of a small volume. The controllable flow rate of the pumps was up to about 40 μl/min and the maximum pumping pressure was about 1 mH₂O. A sample injector made up of two three-way valves has also been fabricated with micromachining.

Original language	English
Pages (from-to)	189-192
Number of pages	4
Journal	Sensors and Actuators: A. Physical
Volume	21
Issue number	1-3
DOIs	https://doi.org/10.1016/0924-4247(90)85036-4
Publication status	Published - 1990 Feb
Externally published	Yes

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Instrumentation
Condensed Matter Physics
Surfaces, Coatings and Films
Metals and Alloys
Electrical and Electronic Engineering

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title = "Micropump and sample-injector for integrated chemical analyzing systems",

abstract = "A dual pump and a buffer pump have been integrated on a silicon wafer for chemical analyzing systems. These pumps realize constant and rippleless liquid flow of a small volume. The controllable flow rate of the pumps was up to about 40 μl/min and the maximum pumping pressure was about 1 mH2O. A sample injector made up of two three-way valves has also been fabricated with micromachining.",

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AU - Esashi, Masayoshi

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N2 - A dual pump and a buffer pump have been integrated on a silicon wafer for chemical analyzing systems. These pumps realize constant and rippleless liquid flow of a small volume. The controllable flow rate of the pumps was up to about 40 μl/min and the maximum pumping pressure was about 1 mH2O. A sample injector made up of two three-way valves has also been fabricated with micromachining.

AB - A dual pump and a buffer pump have been integrated on a silicon wafer for chemical analyzing systems. These pumps realize constant and rippleless liquid flow of a small volume. The controllable flow rate of the pumps was up to about 40 μl/min and the maximum pumping pressure was about 1 mH2O. A sample injector made up of two three-way valves has also been fabricated with micromachining.

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