A dual pump and a buffer pump have been integrated on a silicon wafer for chemical analyzing systems. These pumps realize constant and rippleless liquid flow of a small volume. The controllable flow rate of the pumps was up to about 40 μl/min and the maximum pumping pressure was about 1 mH2O. A sample injector made up of two three-way valves has also been fabricated with micromachining.
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Surfaces, Coatings and Films
- Metals and Alloys
- Electrical and Electronic Engineering