The iridium-alloy coatings with varying contents of tantalum, prepared by dc magnetron sputtering from a composite target, were investigated. It was observed that pure coatings of iridium and tantalum form polycrystalline films with rms roughness of ∼5 nm. The Ir-Ta coatings formed a nanocrystalline structure whose crystallite size and rms roughness decrease with increase in tantalum content. It was shown that the Young's modulus and hardness of the coatings generally decrease with increase in the tantalum content.
|Number of pages||10|
|Journal||Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films|
|Publication status||Published - 2004 Jul 1|
ASJC Scopus subject areas
- Condensed Matter Physics
- Surfaces and Interfaces
- Surfaces, Coatings and Films