Abstract
This section describes various examples of miniaturized thermoelectric devices that use silicon nanowires or low-dimensional fine silicon structures at the submicrometer scale. Focus is centered on the thermoelectric generator, which is anticipated to pave the way for wireless IoT applications. The device structures, fabrication methods, and thermoelectric performances of the various silicon thermoelectric generators reported thus far will be compared.
Original language | English |
---|---|
Title of host publication | Thermoelectric Energy Conversion |
Subtitle of host publication | Theories and Mechanisms, Materials, Devices, and Applications |
Publisher | Elsevier |
Pages | 503-520 |
Number of pages | 18 |
ISBN (Electronic) | 9780128185353 |
DOIs | |
Publication status | Published - 2021 Jan 1 |
Keywords
- Bileg
- Heat resistance
- Lithography
- Silicon nanowire
- Specific power generation capacity
- Unileg
ASJC Scopus subject areas
- Engineering(all)
- Materials Science(all)