Microthermoelectric devices using Si nanowires

Takanobu Watanabe*

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingChapter


This section describes various examples of miniaturized thermoelectric devices that use silicon nanowires or low-dimensional fine silicon structures at the submicrometer scale. Focus is centered on the thermoelectric generator, which is anticipated to pave the way for wireless IoT applications. The device structures, fabrication methods, and thermoelectric performances of the various silicon thermoelectric generators reported thus far will be compared.

Original languageEnglish
Title of host publicationThermoelectric Energy Conversion
Subtitle of host publicationTheories and Mechanisms, Materials, Devices, and Applications
Number of pages18
ISBN (Electronic)9780128185353
Publication statusPublished - 2021 Jan 1


  • Bileg
  • Heat resistance
  • Lithography
  • Silicon nanowire
  • Specific power generation capacity
  • Unileg

ASJC Scopus subject areas

  • Engineering(all)
  • Materials Science(all)


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