MICROWAVE SPUTTERING SYSTEM FOR THE FABRICATION OF THIN SOLID FILMS.

I. Kato, H. C. Card, K. C. Kao, S. R. Mejia, L. Chow

    Research output: Contribution to journalArticle

    7 Citations (Scopus)

    Abstract

    A new microwave-plasma sputtering method is described for the fabrication of thin solid films. One advantage of this method is that the substrate is not exposed to the plasma which can be made very uniform and confined in a predetermined region. It is, therefore, possible to fabricate uniform solid films over a large area and for a wide range of film thicknesses on low melting-point substrates. Amorphous selenium films fabricated on a glass substrate or a polyethylene sheet are found to be very uniform in thickness, structure, and optical constants over a large deposition area.

    Original languageEnglish
    Pages (from-to)214-216
    Number of pages3
    JournalReview of Scientific Instruments
    Volume53
    Issue number2
    DOIs
    Publication statusPublished - 1982 Feb

    Fingerprint

    Sputtering
    sputtering
    Microwaves
    microwaves
    Fabrication
    fabrication
    Substrates
    Plasmas
    Optical constants
    Selenium
    selenium
    melting points
    Melting point
    Film thickness
    Polyethylenes
    polyethylenes
    film thickness
    Glass
    glass

    ASJC Scopus subject areas

    • Physics and Astronomy (miscellaneous)
    • Instrumentation

    Cite this

    MICROWAVE SPUTTERING SYSTEM FOR THE FABRICATION OF THIN SOLID FILMS. / Kato, I.; Card, H. C.; Kao, K. C.; Mejia, S. R.; Chow, L.

    In: Review of Scientific Instruments, Vol. 53, No. 2, 02.1982, p. 214-216.

    Research output: Contribution to journalArticle

    Kato, I, Card, HC, Kao, KC, Mejia, SR & Chow, L 1982, 'MICROWAVE SPUTTERING SYSTEM FOR THE FABRICATION OF THIN SOLID FILMS.', Review of Scientific Instruments, vol. 53, no. 2, pp. 214-216. https://doi.org/10.1063/1.1136929
    Kato, I. ; Card, H. C. ; Kao, K. C. ; Mejia, S. R. ; Chow, L. / MICROWAVE SPUTTERING SYSTEM FOR THE FABRICATION OF THIN SOLID FILMS. In: Review of Scientific Instruments. 1982 ; Vol. 53, No. 2. pp. 214-216.
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