Miniaturized thin-film magnetic field probe with high spatial resolution for LSI chip measurement

Noriaki Ando, Norio Masuda, Naoya Tamaki, Toshihide Kuriyama, Kunio Kato, Mikiko Saito, Shinsaku Saito, Keishi Ohashi, Masahiro Yamaguchi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

33 Citations (Scopus)

Abstract

It is important to obtain the absolute value of current flowing through each power line on a chip of large-scale integrated (LSI) circuits by measurement because this current on an LSI chip is regarded as conductive noise. We have developed a thin-film magnetic field probe that has spatial resolution high enough to obtain the absolute value of high-frequency power current on an LSI chip. Spatial resolution was enhanced by miniaturizing the shielded loop coil, the detection part of the probe. The outer size of the new coil is 50 × 22 μm. In taking measurements with the new probe over a 60-μm-wide microstrip line used as a device under test (DUT), we obtained a 6-dB decrease point of 40 μm, which indicates the spatial resolution of the probe. This value is comparable to the typical width of power lines on an LSI chip, around 50 μm and is less than half that of our conventional probes, around 90 μm. In measurements with the new probe over an LSI chip, we obtained such a fine magnetic near-field distribution that the magnetic fields generated from the lines on the chip were separated. On-chip decoupling was also confirmed by using the new probe. The new probe enables direct verification of a circuit design for suppressing electromagnetic interference (EMI), while conventional coarse mapping of the magnetic near-field cannot be used to evaluate such conductive noise.

Original languageEnglish
Title of host publicationIEEE International Symposium on Electromagnetic Compatibility
Pages357-362
Number of pages6
Volume2
Publication statusPublished - 2004
Event2004 International Symposium on Electromagnetic Compatibility, EMC 2004 - Santa Clara, CA, United States
Duration: 2004 Aug 92004 Aug 13

Other

Other2004 International Symposium on Electromagnetic Compatibility, EMC 2004
CountryUnited States
CitySanta Clara, CA
Period04/8/904/8/13

Fingerprint

spatial resolution
chips
Magnetic fields
Thin films
probes
high resolution
thin films
magnetic fields
power lines
near fields
coils
electromagnetic interference
Microstrip lines
Signal interference
decoupling
integrated circuits
Integrated circuits
Networks (circuits)

Keywords

  • Component
  • High spatial resolution
  • LSI chip
  • Magnetic near-field measurement
  • Microstrip line
  • Thin-film magnetic field probe

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Condensed Matter Physics

Cite this

Ando, N., Masuda, N., Tamaki, N., Kuriyama, T., Kato, K., Saito, M., ... Yamaguchi, M. (2004). Miniaturized thin-film magnetic field probe with high spatial resolution for LSI chip measurement. In IEEE International Symposium on Electromagnetic Compatibility (Vol. 2, pp. 357-362)

Miniaturized thin-film magnetic field probe with high spatial resolution for LSI chip measurement. / Ando, Noriaki; Masuda, Norio; Tamaki, Naoya; Kuriyama, Toshihide; Kato, Kunio; Saito, Mikiko; Saito, Shinsaku; Ohashi, Keishi; Yamaguchi, Masahiro.

IEEE International Symposium on Electromagnetic Compatibility. Vol. 2 2004. p. 357-362.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Ando, N, Masuda, N, Tamaki, N, Kuriyama, T, Kato, K, Saito, M, Saito, S, Ohashi, K & Yamaguchi, M 2004, Miniaturized thin-film magnetic field probe with high spatial resolution for LSI chip measurement. in IEEE International Symposium on Electromagnetic Compatibility. vol. 2, pp. 357-362, 2004 International Symposium on Electromagnetic Compatibility, EMC 2004, Santa Clara, CA, United States, 04/8/9.
Ando N, Masuda N, Tamaki N, Kuriyama T, Kato K, Saito M et al. Miniaturized thin-film magnetic field probe with high spatial resolution for LSI chip measurement. In IEEE International Symposium on Electromagnetic Compatibility. Vol. 2. 2004. p. 357-362
Ando, Noriaki ; Masuda, Norio ; Tamaki, Naoya ; Kuriyama, Toshihide ; Kato, Kunio ; Saito, Mikiko ; Saito, Shinsaku ; Ohashi, Keishi ; Yamaguchi, Masahiro. / Miniaturized thin-film magnetic field probe with high spatial resolution for LSI chip measurement. IEEE International Symposium on Electromagnetic Compatibility. Vol. 2 2004. pp. 357-362
@inproceedings{76aff39a4c2f42689029fe041f088cd9,
title = "Miniaturized thin-film magnetic field probe with high spatial resolution for LSI chip measurement",
abstract = "It is important to obtain the absolute value of current flowing through each power line on a chip of large-scale integrated (LSI) circuits by measurement because this current on an LSI chip is regarded as conductive noise. We have developed a thin-film magnetic field probe that has spatial resolution high enough to obtain the absolute value of high-frequency power current on an LSI chip. Spatial resolution was enhanced by miniaturizing the shielded loop coil, the detection part of the probe. The outer size of the new coil is 50 × 22 μm. In taking measurements with the new probe over a 60-μm-wide microstrip line used as a device under test (DUT), we obtained a 6-dB decrease point of 40 μm, which indicates the spatial resolution of the probe. This value is comparable to the typical width of power lines on an LSI chip, around 50 μm and is less than half that of our conventional probes, around 90 μm. In measurements with the new probe over an LSI chip, we obtained such a fine magnetic near-field distribution that the magnetic fields generated from the lines on the chip were separated. On-chip decoupling was also confirmed by using the new probe. The new probe enables direct verification of a circuit design for suppressing electromagnetic interference (EMI), while conventional coarse mapping of the magnetic near-field cannot be used to evaluate such conductive noise.",
keywords = "Component, High spatial resolution, LSI chip, Magnetic near-field measurement, Microstrip line, Thin-film magnetic field probe",
author = "Noriaki Ando and Norio Masuda and Naoya Tamaki and Toshihide Kuriyama and Kunio Kato and Mikiko Saito and Shinsaku Saito and Keishi Ohashi and Masahiro Yamaguchi",
year = "2004",
language = "English",
volume = "2",
pages = "357--362",
booktitle = "IEEE International Symposium on Electromagnetic Compatibility",

}

TY - GEN

T1 - Miniaturized thin-film magnetic field probe with high spatial resolution for LSI chip measurement

AU - Ando, Noriaki

AU - Masuda, Norio

AU - Tamaki, Naoya

AU - Kuriyama, Toshihide

AU - Kato, Kunio

AU - Saito, Mikiko

AU - Saito, Shinsaku

AU - Ohashi, Keishi

AU - Yamaguchi, Masahiro

PY - 2004

Y1 - 2004

N2 - It is important to obtain the absolute value of current flowing through each power line on a chip of large-scale integrated (LSI) circuits by measurement because this current on an LSI chip is regarded as conductive noise. We have developed a thin-film magnetic field probe that has spatial resolution high enough to obtain the absolute value of high-frequency power current on an LSI chip. Spatial resolution was enhanced by miniaturizing the shielded loop coil, the detection part of the probe. The outer size of the new coil is 50 × 22 μm. In taking measurements with the new probe over a 60-μm-wide microstrip line used as a device under test (DUT), we obtained a 6-dB decrease point of 40 μm, which indicates the spatial resolution of the probe. This value is comparable to the typical width of power lines on an LSI chip, around 50 μm and is less than half that of our conventional probes, around 90 μm. In measurements with the new probe over an LSI chip, we obtained such a fine magnetic near-field distribution that the magnetic fields generated from the lines on the chip were separated. On-chip decoupling was also confirmed by using the new probe. The new probe enables direct verification of a circuit design for suppressing electromagnetic interference (EMI), while conventional coarse mapping of the magnetic near-field cannot be used to evaluate such conductive noise.

AB - It is important to obtain the absolute value of current flowing through each power line on a chip of large-scale integrated (LSI) circuits by measurement because this current on an LSI chip is regarded as conductive noise. We have developed a thin-film magnetic field probe that has spatial resolution high enough to obtain the absolute value of high-frequency power current on an LSI chip. Spatial resolution was enhanced by miniaturizing the shielded loop coil, the detection part of the probe. The outer size of the new coil is 50 × 22 μm. In taking measurements with the new probe over a 60-μm-wide microstrip line used as a device under test (DUT), we obtained a 6-dB decrease point of 40 μm, which indicates the spatial resolution of the probe. This value is comparable to the typical width of power lines on an LSI chip, around 50 μm and is less than half that of our conventional probes, around 90 μm. In measurements with the new probe over an LSI chip, we obtained such a fine magnetic near-field distribution that the magnetic fields generated from the lines on the chip were separated. On-chip decoupling was also confirmed by using the new probe. The new probe enables direct verification of a circuit design for suppressing electromagnetic interference (EMI), while conventional coarse mapping of the magnetic near-field cannot be used to evaluate such conductive noise.

KW - Component

KW - High spatial resolution

KW - LSI chip

KW - Magnetic near-field measurement

KW - Microstrip line

KW - Thin-film magnetic field probe

UR - http://www.scopus.com/inward/record.url?scp=4644231088&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=4644231088&partnerID=8YFLogxK

M3 - Conference contribution

AN - SCOPUS:4644231088

VL - 2

SP - 357

EP - 362

BT - IEEE International Symposium on Electromagnetic Compatibility

ER -