Miniaturized thin-film magnetic field probe with high spatial resolution for LSI chip measurement

Noriaki Ando, Norio Masuda, Naoya Tamaki, Toshihide Kuriyama, Kunio Kato, Mikiko Saito, Shinsaku Saito, Keishi Ohashi, Masahiro Yamaguchi

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36 Citations (Scopus)

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Physics & Astronomy

Engineering & Materials Science