Mn-doping effect on optical absorption of Pb(Zr,Ti)O3 films prepared by aerosol deposition

Hiroki Tsuda, Masafumi Nakada, Jun Akedo, Keishi Ohashi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The Mn-doping effect on the optical absorption of ferroelectric lead zirconate titanate [PZT, Pb(Zr,Ti)O3] films prepared on glass substrates at room temperature by aerosol deposition (AD) were investigated. The optical reflectance and transmittance of the undoped PZT and Mn-doped PZT films were measured in the wavelength range from ultraviolet to near infrared (UV-NIR) and the measured optical spectra were analyzed. The optical absorption of the undoped PZT films was found to be larger than that of the Mn-doped PZT films in the near infrared wavelength range although the analyzed results indicated similar structure for both the undoped PZT and Mn-doped PZT films. Less optical loss and fine dense PZT films with Mn-doping can be deposited by AD at low process temperature.

Original languageEnglish
Title of host publication4th IMAPS/ACerS International Conference and Exhibition on Ceramic Interconnect and Ceramic Microsystems Technologies 2008, CICMT 2008
Pages475-477
Number of pages3
Publication statusPublished - 2008 Dec 1
Externally publishedYes
Event4th International Conference on Ceramic Interconnect and Ceramic Microsystems Technologies, CICMT 2008 - Munich, Germany
Duration: 2008 Apr 212008 Apr 24

Publication series

Name4th IMAPS/ACerS International Conference and Exhibition on Ceramic Interconnect and Ceramic Microsystems Technologies 2008, CICMT 2008

Other

Other4th International Conference on Ceramic Interconnect and Ceramic Microsystems Technologies, CICMT 2008
CountryGermany
CityMunich
Period08/4/2108/4/24

Keywords

  • Aerosol deposition
  • Mn-doping
  • Optical absorption
  • Optical spectroscopy
  • PZT

ASJC Scopus subject areas

  • Hardware and Architecture
  • Ceramics and Composites

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    Tsuda, H., Nakada, M., Akedo, J., & Ohashi, K. (2008). Mn-doping effect on optical absorption of Pb(Zr,Ti)O3 films prepared by aerosol deposition. In 4th IMAPS/ACerS International Conference and Exhibition on Ceramic Interconnect and Ceramic Microsystems Technologies 2008, CICMT 2008 (pp. 475-477). (4th IMAPS/ACerS International Conference and Exhibition on Ceramic Interconnect and Ceramic Microsystems Technologies 2008, CICMT 2008).