Mn-doping effect on optical absorption of Pb(Zr,Ti)O3 films prepared by aerosol deposition

Hiroki Tsuda, Masafumi Nakada, Jun Akedo, Keishi Ohashi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The Mn-doping effect on the optical absorption of ferroelectric lead zirconate titanate [PZT, Pb(Zr,Ti)O3] films prepared on glass substrates at room temperature by aerosol deposition (AD) were investigated. The optical reflectance and transmittance of the undoped PZT and Mn-doped PZT films were measured in the wavelength range from ultraviolet to near infrared (UV-NIR) and the measured optical spectra were analyzed. The optical absorption of the undoped PZT films was found to be larger than that of the Mn-doped PZT films in the near infrared wavelength range although the analyzed results indicated similar structure for both the undoped PZT and Mn-doped PZT films. Less optical loss and fine dense PZT films with Mn-doping can be deposited by AD at low process temperature.

Original languageEnglish
Title of host publication4th IMAPS/ACerS International Conference and Exhibition on Ceramic Interconnect and Ceramic Microsystems Technologies 2008, CICMT 2008
Pages475-477
Number of pages3
Publication statusPublished - 2008 Dec 1
Externally publishedYes
Event4th International Conference on Ceramic Interconnect and Ceramic Microsystems Technologies, CICMT 2008 - Munich, Germany
Duration: 2008 Apr 212008 Apr 24

Publication series

Name4th IMAPS/ACerS International Conference and Exhibition on Ceramic Interconnect and Ceramic Microsystems Technologies 2008, CICMT 2008

Other

Other4th International Conference on Ceramic Interconnect and Ceramic Microsystems Technologies, CICMT 2008
Country/TerritoryGermany
CityMunich
Period08/4/2108/4/24

Keywords

  • Aerosol deposition
  • Mn-doping
  • Optical absorption
  • Optical spectroscopy
  • PZT

ASJC Scopus subject areas

  • Hardware and Architecture
  • Ceramics and Composites

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