Abstract
The electrical characteristics of nitrided oxide MISFET's are studied. Channel electron mobility in nitrided oxide is almost half that in oxide. Mobility degradation is analyzed and positive charges are seen to be generated in the initial nitridation step. Negative charges are generated by further nitridation. A strong relationship exists between these charges and mobility degradation. It is therefore thought that mobility degradation is caused by coulomb scattering of positive and negative charges in nitrided oxide.
| Original language | English |
|---|---|
| Pages (from-to) | 166-172 |
| Number of pages | 7 |
| Journal | Journal of the Electrochemical Society |
| Volume | 135 |
| Issue number | 1 |
| Publication status | Published - 1988 Jan |
| Externally published | Yes |
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ASJC Scopus subject areas
- Electrochemistry
- Surfaces, Coatings and Films
- Surfaces and Interfaces
Cite this
MOBILITY DEGRADATION OF NITRIDED OXIDE MISFET'S. / Kusaka, Takahisa; Hiraiwa, Atsushi; Mukai, Kiichiro.
In: Journal of the Electrochemical Society, Vol. 135, No. 1, 01.1988, p. 166-172.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - MOBILITY DEGRADATION OF NITRIDED OXIDE MISFET'S.
AU - Kusaka, Takahisa
AU - Hiraiwa, Atsushi
AU - Mukai, Kiichiro
PY - 1988/1
Y1 - 1988/1
N2 - The electrical characteristics of nitrided oxide MISFET's are studied. Channel electron mobility in nitrided oxide is almost half that in oxide. Mobility degradation is analyzed and positive charges are seen to be generated in the initial nitridation step. Negative charges are generated by further nitridation. A strong relationship exists between these charges and mobility degradation. It is therefore thought that mobility degradation is caused by coulomb scattering of positive and negative charges in nitrided oxide.
AB - The electrical characteristics of nitrided oxide MISFET's are studied. Channel electron mobility in nitrided oxide is almost half that in oxide. Mobility degradation is analyzed and positive charges are seen to be generated in the initial nitridation step. Negative charges are generated by further nitridation. A strong relationship exists between these charges and mobility degradation. It is therefore thought that mobility degradation is caused by coulomb scattering of positive and negative charges in nitrided oxide.
UR - http://www.scopus.com/inward/record.url?scp=0023825648&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=0023825648&partnerID=8YFLogxK
M3 - Article
AN - SCOPUS:0023825648
VL - 135
SP - 166
EP - 172
JO - Journal of the Electrochemical Society
JF - Journal of the Electrochemical Society
SN - 0013-4651
IS - 1
ER -