MOLECULAR BEAM EPITAXIAL GROWTH OF InAs.

Mitsuaki Yano, Masaharu Nogami, Yuichi Matsushima, Morihiko Kimata

Research output: Chapter in Book/Report/Conference proceedingChapter

38 Citations (Scopus)

Abstract

Thin crystalline films of InAs have been heteroepitaxially grown on (100) surface of GaAs by molecular beam epitaxy. The films are evaluated by optical microscope, SEM, RHEED and electrical measurements. In spite of the existence of a large lattice mismatch between InAs and GaAs, specular InAs films are obtained. Undoped InAs films show the n-type conduction, and their electron concentrations and mobilities are varied depending on the substrate temperature (T//s) during growth. At T//s equals 480 C, single crystalline films with high crystallographic quality and flat surfaces are grown. Furthermore, Mg atoms are successfully doped into InAs during the MBE growth to obtain p-type films.

Original languageEnglish
Title of host publicationJpn J Appl Phys
Pages2131-2137
Number of pages7
Volume16
Edition12
Publication statusPublished - 1977 Dec

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Molecular beams
Epitaxial growth
Molecular beam epitaxy
Crystalline materials
Reflection high energy electron diffraction
Lattice mismatch
Microscopes
Atoms
Scanning electron microscopy
Electrons
Substrates

ASJC Scopus subject areas

  • Engineering(all)

Cite this

Yano, M., Nogami, M., Matsushima, Y., & Kimata, M. (1977). MOLECULAR BEAM EPITAXIAL GROWTH OF InAs. In Jpn J Appl Phys (12 ed., Vol. 16, pp. 2131-2137)

MOLECULAR BEAM EPITAXIAL GROWTH OF InAs. / Yano, Mitsuaki; Nogami, Masaharu; Matsushima, Yuichi; Kimata, Morihiko.

Jpn J Appl Phys. Vol. 16 12. ed. 1977. p. 2131-2137.

Research output: Chapter in Book/Report/Conference proceedingChapter

Yano, M, Nogami, M, Matsushima, Y & Kimata, M 1977, MOLECULAR BEAM EPITAXIAL GROWTH OF InAs. in Jpn J Appl Phys. 12 edn, vol. 16, pp. 2131-2137.
Yano M, Nogami M, Matsushima Y, Kimata M. MOLECULAR BEAM EPITAXIAL GROWTH OF InAs. In Jpn J Appl Phys. 12 ed. Vol. 16. 1977. p. 2131-2137
Yano, Mitsuaki ; Nogami, Masaharu ; Matsushima, Yuichi ; Kimata, Morihiko. / MOLECULAR BEAM EPITAXIAL GROWTH OF InAs. Jpn J Appl Phys. Vol. 16 12. ed. 1977. pp. 2131-2137
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