Monte Carlo calculation approach to quantitative Auger electron spectroscopy

Shingo Ichimura*, Mikio Aratama, Ryuichi Shimizu

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

74 Citations (Scopus)


A Monte Carlo calculation technique based on both the partial wave expansion method for elastic scattering and Krefting and Reimer's treatment for inelastic scattering was applied for quantitative study by Auger electron spectroscopy. The theory has described the experiment of energy and angular distributions of backscattered electrons with considerable success. Dependence of the Auger signal generation on primary electron energy was investigated with a scanning Auger electron microscope, and the result was compared with the theory for a number of elements of practical interest. Through this, we have found that the present Monte Carlo approach allows us to evaluate contributions of backscattered electrons to Auger signal generation leading to more comprehensive quantitative AES study.

Original languageEnglish
Pages (from-to)2853-2860
Number of pages8
JournalJournal of Applied Physics
Issue number5
Publication statusPublished - 1980
Externally publishedYes

ASJC Scopus subject areas

  • Physics and Astronomy(all)


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