MOVPE growth of strained InGaAsN/GaAs quantum wells

Hisao Saito, Toshiki Makimoto, Naoki Kobayashi

Research output: Contribution to journalArticle

74 Citations (Scopus)

Abstract

The strained In0.13Ga0.7As1-xNx (x = 0-0.01)/GaAs quantum wells (QWs) with 10 nm well thicknesses were grown by MOVPE at 500°C using dimethylhydrazine (DMHy) as the nitrogen source. The nitrogen was nonlinearly incorporated into the solid by increasing the partial pressure of DMHy in the vapor phase. The peak energy of photoluminescence (PL) was red-shifted by increasing the composition of nitrogen up to x =0.002 and showed a large band-gap bowing of - 82 eV. The as-grown In0.3Ga0.7As0.99N0.01 QW had a weak PL intensity of more than two orders of magnitude lower than that of In0.3Ga0.7As QW, but by annealing in a N2 atmosphere at 650°C, the PL intensity recovered and peaked at 1.26 μm at 10 K. The PL recovery seems to have been related to the depassivation of hydrogen. From a SIMS analysis, the as-grown In0.3Ga0.7As0.99N0.01 QW showed a hydrogen concentration as high as 6 × 1019 cm-3, but decreased to 2.5 × 1019 cm-3 after annealing in N2 for 1 h.

Original languageEnglish
Pages (from-to)416-420
Number of pages5
JournalJournal of Crystal Growth
Volume195
Issue number1-4
Publication statusPublished - 1998 Dec 15
Externally publishedYes

Fingerprint

Metallorganic vapor phase epitaxy
Semiconductor quantum wells
Photoluminescence
dimethylhydrazines
Dimethylhydrazines
quantum wells
photoluminescence
Nitrogen
nitrogen
Hydrogen
Annealing
Bending (forming)
annealing
hydrogen
Secondary ion mass spectrometry
Partial pressure
secondary ion mass spectrometry
partial pressure
Energy gap
recovery

Keywords

  • Dimethyl-hydrazine
  • InGaAsN
  • MOVPE
  • Strained quantum well laser

ASJC Scopus subject areas

  • Condensed Matter Physics

Cite this

MOVPE growth of strained InGaAsN/GaAs quantum wells. / Saito, Hisao; Makimoto, Toshiki; Kobayashi, Naoki.

In: Journal of Crystal Growth, Vol. 195, No. 1-4, 15.12.1998, p. 416-420.

Research output: Contribution to journalArticle

Saito, H, Makimoto, T & Kobayashi, N 1998, 'MOVPE growth of strained InGaAsN/GaAs quantum wells', Journal of Crystal Growth, vol. 195, no. 1-4, pp. 416-420.
Saito, Hisao ; Makimoto, Toshiki ; Kobayashi, Naoki. / MOVPE growth of strained InGaAsN/GaAs quantum wells. In: Journal of Crystal Growth. 1998 ; Vol. 195, No. 1-4. pp. 416-420.
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N2 - The strained In0.13Ga0.7As1-xNx (x = 0-0.01)/GaAs quantum wells (QWs) with 10 nm well thicknesses were grown by MOVPE at 500°C using dimethylhydrazine (DMHy) as the nitrogen source. The nitrogen was nonlinearly incorporated into the solid by increasing the partial pressure of DMHy in the vapor phase. The peak energy of photoluminescence (PL) was red-shifted by increasing the composition of nitrogen up to x =0.002 and showed a large band-gap bowing of - 82 eV. The as-grown In0.3Ga0.7As0.99N0.01 QW had a weak PL intensity of more than two orders of magnitude lower than that of In0.3Ga0.7As QW, but by annealing in a N2 atmosphere at 650°C, the PL intensity recovered and peaked at 1.26 μm at 10 K. The PL recovery seems to have been related to the depassivation of hydrogen. From a SIMS analysis, the as-grown In0.3Ga0.7As0.99N0.01 QW showed a hydrogen concentration as high as 6 × 1019 cm-3, but decreased to 2.5 × 1019 cm-3 after annealing in N2 for 1 h.

AB - The strained In0.13Ga0.7As1-xNx (x = 0-0.01)/GaAs quantum wells (QWs) with 10 nm well thicknesses were grown by MOVPE at 500°C using dimethylhydrazine (DMHy) as the nitrogen source. The nitrogen was nonlinearly incorporated into the solid by increasing the partial pressure of DMHy in the vapor phase. The peak energy of photoluminescence (PL) was red-shifted by increasing the composition of nitrogen up to x =0.002 and showed a large band-gap bowing of - 82 eV. The as-grown In0.3Ga0.7As0.99N0.01 QW had a weak PL intensity of more than two orders of magnitude lower than that of In0.3Ga0.7As QW, but by annealing in a N2 atmosphere at 650°C, the PL intensity recovered and peaked at 1.26 μm at 10 K. The PL recovery seems to have been related to the depassivation of hydrogen. From a SIMS analysis, the as-grown In0.3Ga0.7As0.99N0.01 QW showed a hydrogen concentration as high as 6 × 1019 cm-3, but decreased to 2.5 × 1019 cm-3 after annealing in N2 for 1 h.

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