Multi-step sequential batch self-assembly of three-dimensional micro-structures using magnetic field

Eiji Iwase, Isao Shimoyama

Research output: Contribution to journalConference article

3 Citations (Scopus)

Abstract

We have developed a process for multi-step sequential batch self-assembly of complex three-dimensional ferromagnetic micro-structures. The process uses the magnetic torque generated by an external magnetic field perpendicular to the substrate to lift hinged-structures. In our previous study, we found that a non-dimensional factor that depends on its shape determines the sensitivity of the micro hinged-structures to a magnetic field. This factor can be used as a criterion in designing a process for sequential batch self-assembly, because the factor indicates the differences in the sensitivity. In this study, we designed multi-step sequential assembly by using the non-dimensional factor. Four-step sequential batch assembly was demonstrated using this method.

Original languageEnglish
Article numberTPb41
Pages (from-to)588-591
Number of pages4
JournalProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Publication statusPublished - 2005 Oct 25
Externally publishedYes
Event18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005 Miami - Miami Beach, FL, United States
Duration: 2005 Jan 302005 Feb 3

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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