Multi-step sequential batch self-assembly of three-dimensional micro-structures using magnetic field

Eiji Iwase, Isao Shimoyama

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)

Abstract

We have developed a process for multi-step sequential batch self-assembly of complex three-dimensional ferromagnetic micro-structures. The process uses the magnetic torque generated by an external magnetic field perpendicular to the substrate to lift hinged-structures. In our previous study, we found that a non-dimensional factor that depends on its shape determines the sensitivity of the micro hinged-structures to a magnetic field. This factor can be used as a criterion in designing a process for sequential batch self-assembly, because the factor indicates the differences in the sensitivity. In this study, we designed multi-step sequential assembly by using the non-dimensional factor. Four-step sequential batch assembly was demonstrated using this method.

Original languageEnglish
Title of host publicationProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Pages588-591
Number of pages4
Publication statusPublished - 2005
Externally publishedYes
Event18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005 Miami - Miami Beach, FL, United States
Duration: 2005 Jan 302005 Feb 3

Other

Other18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005 Miami
CountryUnited States
CityMiami Beach, FL
Period05/1/3005/2/3

Fingerprint

Self assembly
Magnetic fields
Microstructure
Torque
Substrates

ASJC Scopus subject areas

  • Mechanical Engineering
  • Electrical and Electronic Engineering
  • Control and Systems Engineering

Cite this

Iwase, E., & Shimoyama, I. (2005). Multi-step sequential batch self-assembly of three-dimensional micro-structures using magnetic field. In Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) (pp. 588-591). [TPb41]

Multi-step sequential batch self-assembly of three-dimensional micro-structures using magnetic field. / Iwase, Eiji; Shimoyama, Isao.

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS). 2005. p. 588-591 TPb41.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Iwase, E & Shimoyama, I 2005, Multi-step sequential batch self-assembly of three-dimensional micro-structures using magnetic field. in Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)., TPb41, pp. 588-591, 18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005 Miami, Miami Beach, FL, United States, 05/1/30.
Iwase E, Shimoyama I. Multi-step sequential batch self-assembly of three-dimensional micro-structures using magnetic field. In Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS). 2005. p. 588-591. TPb41
Iwase, Eiji ; Shimoyama, Isao. / Multi-step sequential batch self-assembly of three-dimensional micro-structures using magnetic field. Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS). 2005. pp. 588-591
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