Abstract
We have developed a process for multi-step sequential batch self-assembly of complex three-dimensional ferromagnetic micro-structures. The process uses the magnetic torque generated by an external magnetic field perpendicular to the substrate to lift hinged-structures. In our previous study, we found that a non-dimensional factor that depends on its shape determines the sensitivity of the micro hinged-structures to a magnetic field. This factor can be used as a criterion in designing a process for sequential batch self-assembly, because the factor indicates the differences in the sensitivity. In this study, we designed multi-step sequential assembly by using the non-dimensional factor. Four-step sequential batch assembly was demonstrated using this method.
| Original language | English |
|---|---|
| Title of host publication | Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) |
| Pages | 588-591 |
| Number of pages | 4 |
| Publication status | Published - 2005 |
| Externally published | Yes |
| Event | 18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005 Miami - Miami Beach, FL, United States Duration: 2005 Jan 30 → 2005 Feb 3 |
Other
| Other | 18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005 Miami |
|---|---|
| Country | United States |
| City | Miami Beach, FL |
| Period | 05/1/30 → 05/2/3 |
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ASJC Scopus subject areas
- Mechanical Engineering
- Electrical and Electronic Engineering
- Control and Systems Engineering
Cite this
Multi-step sequential batch self-assembly of three-dimensional micro-structures using magnetic field. / Iwase, Eiji; Shimoyama, Isao.
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS). 2005. p. 588-591 TPb41.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
}
TY - GEN
T1 - Multi-step sequential batch self-assembly of three-dimensional micro-structures using magnetic field
AU - Iwase, Eiji
AU - Shimoyama, Isao
PY - 2005
Y1 - 2005
N2 - We have developed a process for multi-step sequential batch self-assembly of complex three-dimensional ferromagnetic micro-structures. The process uses the magnetic torque generated by an external magnetic field perpendicular to the substrate to lift hinged-structures. In our previous study, we found that a non-dimensional factor that depends on its shape determines the sensitivity of the micro hinged-structures to a magnetic field. This factor can be used as a criterion in designing a process for sequential batch self-assembly, because the factor indicates the differences in the sensitivity. In this study, we designed multi-step sequential assembly by using the non-dimensional factor. Four-step sequential batch assembly was demonstrated using this method.
AB - We have developed a process for multi-step sequential batch self-assembly of complex three-dimensional ferromagnetic micro-structures. The process uses the magnetic torque generated by an external magnetic field perpendicular to the substrate to lift hinged-structures. In our previous study, we found that a non-dimensional factor that depends on its shape determines the sensitivity of the micro hinged-structures to a magnetic field. This factor can be used as a criterion in designing a process for sequential batch self-assembly, because the factor indicates the differences in the sensitivity. In this study, we designed multi-step sequential assembly by using the non-dimensional factor. Four-step sequential batch assembly was demonstrated using this method.
UR - http://www.scopus.com/inward/record.url?scp=26844570678&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=26844570678&partnerID=8YFLogxK
M3 - Conference contribution
AN - SCOPUS:26844570678
SP - 588
EP - 591
BT - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ER -