Multiple shear wave roundtrips liquid sensor by c-axis parallel oriented ZnO film/silica glass pipe structure

Shoko Hiyama, Takahiko Yanagitani, Shinji Takayanagi, Yoshiya Kato, Mami Matsukawa

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

We demonstrated the multiple roundtrips of shear horizontal (SH) waves using IDT/c-axis parallel-oriented (1120) ZnO film/silica glass pipe structure for a high-sensitive liquid sensor. Forth roundtrip was observed in the time response of acoustic waves. The insertion loss of the first lap consisted of two frequency components at 131 MHz and 160-350 MHz. IDT/c-axis parallel-oriented ZnO film/silica glass cylinder structure was also fabricated, but multiple roundtrips were not occurred. Therefore, we considered the waves propagating in the pipe structure as plate type waves, not surface acoustic waves. In addition, the liquid loading characteristics of the pipe structure sensor were measured by immersing inside or outside of the pipe in liquid. Because the insertion loss increases in the pipe structure with pure water loading were relatively small, we can conclude that the waves were SH-type plate wave. Liquid property detections using both outside and inside of the pipe structure sensor are expected.

Original languageEnglish
Title of host publicationIEEE International Ultrasonics Symposium, IUS
PublisherIEEE Computer Society
Pages765-768
Number of pages4
ISBN (Electronic)9781479970490
DOIs
Publication statusPublished - 2014 Oct 20
Externally publishedYes
Event2014 IEEE International Ultrasonics Symposium, IUS 2014 - Chicago, United States
Duration: 2014 Sep 32014 Sep 6

Publication series

NameIEEE International Ultrasonics Symposium, IUS
ISSN (Print)1948-5719
ISSN (Electronic)1948-5727

Other

Other2014 IEEE International Ultrasonics Symposium, IUS 2014
CountryUnited States
CityChicago
Period14/9/314/9/6

Keywords

  • Multiple roundtrip
  • Pipe structure
  • Shear wave
  • c-axis parallel-oriented ZnO
  • liquid sensor

ASJC Scopus subject areas

  • Acoustics and Ultrasonics

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  • Cite this

    Hiyama, S., Yanagitani, T., Takayanagi, S., Kato, Y., & Matsukawa, M. (2014). Multiple shear wave roundtrips liquid sensor by c-axis parallel oriented ZnO film/silica glass pipe structure. In IEEE International Ultrasonics Symposium, IUS (pp. 765-768). [6932056] (IEEE International Ultrasonics Symposium, IUS). IEEE Computer Society. https://doi.org/10.1109/ULTSYM.2014.0189