Abstract
In this paper, we have developed a process for multi-step sequential batch assembly of complex three-dimensional (3-D) ferromagnetic microstructures. The process uses the magnetic torque generated by an external magnetic field perpendicular to the substrate to lift hinged structures. We found that a dimension-less factor that depends on the volume of the magnetic material and the stiffness of the hinges determines the sensitivity of the hinged microstructures to a magnetic field. This factor was used as a criterion in designing a process for sequential batch assembly, i.e., for setting appropriate differences in sensitivity. Using a dimensionless factor in the design of the sequential assembly simplified the assembly process, which requires only placing the structures on a permanent magnet, and which can be used to carry out multistep sequential batch assembly. We fabricated hinged microstructures, which consist of 4.5-μ-thick electroplated Permalloy plates and 200-nm-thick nickel elastic hinges of various sizes. In an experiment, four plates (600 μm × 800 μm) were lifted sequentially and out-of-plane microstructures were assembled in a four-step process. Assembly of more complex out-of-plane microstructures (e.g., regular tetrahedrons, 800 μm long on one side) was also shown to be feasible using this method of sequential batch assembly.
| Original language | English |
|---|---|
| Pages (from-to) | 1265-1271 |
| Number of pages | 7 |
| Journal | Journal of Microelectromechanical Systems |
| Volume | 14 |
| Issue number | 6 |
| DOIs | |
| Publication status | Published - 2005 Dec |
| Externally published | Yes |
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Keywords
- Batch assembly
- Elastic hinges
- Magnetostatic torque
- Sequential assembly
- Three-dimensional (3-D) microstructures
ASJC Scopus subject areas
- Electrical and Electronic Engineering
- Mechanical Engineering
Cite this
Multistep sequential batch assembly of three-dimensional ferromagnetic microstructures with elastic hinges. / Iwase, Eiji; Shimoyama, Isao.
In: Journal of Microelectromechanical Systems, Vol. 14, No. 6, 12.2005, p. 1265-1271.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - Multistep sequential batch assembly of three-dimensional ferromagnetic microstructures with elastic hinges
AU - Iwase, Eiji
AU - Shimoyama, Isao
PY - 2005/12
Y1 - 2005/12
N2 - In this paper, we have developed a process for multi-step sequential batch assembly of complex three-dimensional (3-D) ferromagnetic microstructures. The process uses the magnetic torque generated by an external magnetic field perpendicular to the substrate to lift hinged structures. We found that a dimension-less factor that depends on the volume of the magnetic material and the stiffness of the hinges determines the sensitivity of the hinged microstructures to a magnetic field. This factor was used as a criterion in designing a process for sequential batch assembly, i.e., for setting appropriate differences in sensitivity. Using a dimensionless factor in the design of the sequential assembly simplified the assembly process, which requires only placing the structures on a permanent magnet, and which can be used to carry out multistep sequential batch assembly. We fabricated hinged microstructures, which consist of 4.5-μ-thick electroplated Permalloy plates and 200-nm-thick nickel elastic hinges of various sizes. In an experiment, four plates (600 μm × 800 μm) were lifted sequentially and out-of-plane microstructures were assembled in a four-step process. Assembly of more complex out-of-plane microstructures (e.g., regular tetrahedrons, 800 μm long on one side) was also shown to be feasible using this method of sequential batch assembly.
AB - In this paper, we have developed a process for multi-step sequential batch assembly of complex three-dimensional (3-D) ferromagnetic microstructures. The process uses the magnetic torque generated by an external magnetic field perpendicular to the substrate to lift hinged structures. We found that a dimension-less factor that depends on the volume of the magnetic material and the stiffness of the hinges determines the sensitivity of the hinged microstructures to a magnetic field. This factor was used as a criterion in designing a process for sequential batch assembly, i.e., for setting appropriate differences in sensitivity. Using a dimensionless factor in the design of the sequential assembly simplified the assembly process, which requires only placing the structures on a permanent magnet, and which can be used to carry out multistep sequential batch assembly. We fabricated hinged microstructures, which consist of 4.5-μ-thick electroplated Permalloy plates and 200-nm-thick nickel elastic hinges of various sizes. In an experiment, four plates (600 μm × 800 μm) were lifted sequentially and out-of-plane microstructures were assembled in a four-step process. Assembly of more complex out-of-plane microstructures (e.g., regular tetrahedrons, 800 μm long on one side) was also shown to be feasible using this method of sequential batch assembly.
KW - Batch assembly
KW - Elastic hinges
KW - Magnetostatic torque
KW - Sequential assembly
KW - Three-dimensional (3-D) microstructures
UR - http://www.scopus.com/inward/record.url?scp=29244460396&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=29244460396&partnerID=8YFLogxK
U2 - 10.1109/JMEMS.2005.851814
DO - 10.1109/JMEMS.2005.851814
M3 - Article
AN - SCOPUS:29244460396
VL - 14
SP - 1265
EP - 1271
JO - Journal of Microelectromechanical Systems
JF - Journal of Microelectromechanical Systems
SN - 1057-7157
IS - 6
ER -