Nano- and micro-fabrication of perfluorinated polymers using quantum beam technology

Nozomi Miyoshi, Akihiro Oshima, Tatsuya Urakawa, Naoyuki Fukutake, Hiroyuki Nagai, Tomoko Gowa, Yuya Takasawa, Tomohiro Takahashi, Yukari Numata, Takanori Katoh, Etsuko Katoh, Seiichi Tagawa, Masakazu Washio

    Research output: Contribution to journalArticle

    11 Citations (Scopus)

    Abstract

    Micro- and nano-fabrication researches of various perfluorinated polymers carried out recently both by synchrotron radiation (SR) direct photo-etching and by focused ion beam (FIB) direct mask less etching are reviewed. After the irradiation, the etching depth of the fabricated samples has been evaluated by optical microscope and scanning electron microscope. SR-induced surface modifications were studied by solid-state 19F nuclear magnetic resonance (NMR) spectroscopy and differential scanning calorimeter (DSC) analysis. It was found that the etching rate of FEP at 140°C was highest and that of PTFE and PFA at 140°C was lower in the SR etching. It was found that crosslinking reactions were induced by SR irradiation at the region within about 50γm from the irradiated surface. FIB mask less etching showed very attractive features for nano-scale fabrications. The aspect ratio for crosslinked PTFE (RX-PTFE) reached 390. In addition, the nano-scale controlled structures with high aspect and quality of RX-PTFE were obtained without solid debris.

    Original languageEnglish
    Pages (from-to)230-235
    Number of pages6
    JournalRadiation Physics and Chemistry
    Volume80
    Issue number2
    DOIs
    Publication statusPublished - 2011 Feb

    Fingerprint

    nanofabrication
    etching
    fabrication
    synchrotron radiation
    polymers
    masks
    ion beams
    irradiation
    scanning
    magnetic resonance spectroscopy
    crosslinking
    optical microscopes
    debris
    calorimeters
    aspect ratio
    electron microscopes
    solid state
    nuclear magnetic resonance

    Keywords

    • Aspect ratio
    • Crosslinked PTFE
    • Direct etching
    • Focused ion beam (FIB)
    • Nanostructure
    • Synchrotron radiation (SR)

    ASJC Scopus subject areas

    • Radiation

    Cite this

    Nano- and micro-fabrication of perfluorinated polymers using quantum beam technology. / Miyoshi, Nozomi; Oshima, Akihiro; Urakawa, Tatsuya; Fukutake, Naoyuki; Nagai, Hiroyuki; Gowa, Tomoko; Takasawa, Yuya; Takahashi, Tomohiro; Numata, Yukari; Katoh, Takanori; Katoh, Etsuko; Tagawa, Seiichi; Washio, Masakazu.

    In: Radiation Physics and Chemistry, Vol. 80, No. 2, 02.2011, p. 230-235.

    Research output: Contribution to journalArticle

    Miyoshi, N, Oshima, A, Urakawa, T, Fukutake, N, Nagai, H, Gowa, T, Takasawa, Y, Takahashi, T, Numata, Y, Katoh, T, Katoh, E, Tagawa, S & Washio, M 2011, 'Nano- and micro-fabrication of perfluorinated polymers using quantum beam technology', Radiation Physics and Chemistry, vol. 80, no. 2, pp. 230-235. https://doi.org/10.1016/j.radphyschem.2010.07.037
    Miyoshi, Nozomi ; Oshima, Akihiro ; Urakawa, Tatsuya ; Fukutake, Naoyuki ; Nagai, Hiroyuki ; Gowa, Tomoko ; Takasawa, Yuya ; Takahashi, Tomohiro ; Numata, Yukari ; Katoh, Takanori ; Katoh, Etsuko ; Tagawa, Seiichi ; Washio, Masakazu. / Nano- and micro-fabrication of perfluorinated polymers using quantum beam technology. In: Radiation Physics and Chemistry. 2011 ; Vol. 80, No. 2. pp. 230-235.
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