Nano- and micro-fabrications of polystyrene having atactic and syndiotactic structures using focused ion beams lithography

Akihiro Oshima, Satoshi Okubo, Tomoko Gowa Oyama, Masakazu Washio, Seiichi Tagawa

    Research output: Contribution to journalArticle

    5 Citations (Scopus)

    Abstract

    Micro- and nano-fabrications of polystyrene (PS) having the atactic and syndiotactic structures were carried out with direct maskless etching using focused ion beam (FIB). Micro- and nano-scale structures were obtained with selective beam and material conditions avoiding the beam-heating and charge-up effects. The etching rates were different between atactic and syndiotactic PS. The rate of fabrication for syndiotactic PS shows higher than that of atactic one. Moreover, the direct etching was influenced by the molecular weight. The etching rate for the lower molecular weight became the faster. The FIB direct etching proceeds through the two steps (decomposition and desorption (outgas)). Both decomposition and desorption are influenced by both conformation (morphology) and configuration (stereoregularity). Furthermore, the beam profiles and fluence play the important roles to perform the nano-fabrication of PS.

    Original languageEnglish
    Pages (from-to)584-588
    Number of pages5
    JournalRadiation Physics and Chemistry
    Volume81
    Issue number5
    DOIs
    Publication statusPublished - 2012 May

    Fingerprint

    nanofabrication
    polystyrene
    lithography
    ion beams
    etching
    fabrication
    desorption
    decomposition
    low molecular weights
    molecular weight
    fluence
    heating
    profiles
    configurations

    Keywords

    • Focused ion beams
    • Molecular weight dependence
    • Morphology
    • Nano-fabrication
    • Polystyrene
    • Stereoregularity

    ASJC Scopus subject areas

    • Radiation

    Cite this

    Nano- and micro-fabrications of polystyrene having atactic and syndiotactic structures using focused ion beams lithography. / Oshima, Akihiro; Okubo, Satoshi; Oyama, Tomoko Gowa; Washio, Masakazu; Tagawa, Seiichi.

    In: Radiation Physics and Chemistry, Vol. 81, No. 5, 05.2012, p. 584-588.

    Research output: Contribution to journalArticle

    Oshima, Akihiro ; Okubo, Satoshi ; Oyama, Tomoko Gowa ; Washio, Masakazu ; Tagawa, Seiichi. / Nano- and micro-fabrications of polystyrene having atactic and syndiotactic structures using focused ion beams lithography. In: Radiation Physics and Chemistry. 2012 ; Vol. 81, No. 5. pp. 584-588.
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    AU - Washio, Masakazu

    AU - Tagawa, Seiichi

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