Nano-fabrication and functionalization of crosslinked PTFE using focused ion beam

Yuya Takasawa, Naoyuki Fukutake, Kazumasa Okamoto, Akihiro Oshima, Seiichi Tagawa, Masakazu Washio

    Research output: Contribution to journalArticle

    6 Citations (Scopus)

    Abstract

    It was demonstrated that the nano / microfabrication and functionalization for crosslinked Polytetrafluoroethylene (RX-PTFE) were carried out using focused ion beam (FIB). The fine pattern of the regularly nano-scale square array holes with 300 nm square size were fabricated by FIB direct etching. The fabricated samples were functionalized by post grafting reaction using trapped free radicals induced by FIB irradiation, and the samples were successively sulfonated. The obtained samples were treated by the mixture solution of KOH/KC1 to make potassium form, and observed by FE-SEM with EDX spectroscopy. The signals correspond to potassium atom were detected at the holes in fabricated area of RX-PTFE. On the other hand, the signals of potassium formed sulfonic group were hardly detected at the distance of 10 urn from the hole's center in the fabricated area.

    Original languageEnglish
    Pages (from-to)341-345
    Number of pages5
    JournalJournal of Photopolymer Science and Technology
    Volume22
    Issue number3
    DOIs
    Publication statusPublished - 2009

    Fingerprint

    Focused ion beams
    Polytetrafluoroethylene
    Nanotechnology
    Polytetrafluoroethylenes
    Potassium
    Microfabrication
    Free radicals
    Free Radicals
    Energy dispersive spectroscopy
    Etching
    Irradiation
    Spectroscopy
    Atoms
    Scanning electron microscopy

    Keywords

    • Crosslinked PTFE
    • EDX spectroscopy
    • FIB
    • Grafting functionalization
    • Nano-fabrication

    ASJC Scopus subject areas

    • Materials Chemistry
    • Polymers and Plastics
    • Organic Chemistry

    Cite this

    Nano-fabrication and functionalization of crosslinked PTFE using focused ion beam. / Takasawa, Yuya; Fukutake, Naoyuki; Okamoto, Kazumasa; Oshima, Akihiro; Tagawa, Seiichi; Washio, Masakazu.

    In: Journal of Photopolymer Science and Technology, Vol. 22, No. 3, 2009, p. 341-345.

    Research output: Contribution to journalArticle

    Takasawa, Yuya ; Fukutake, Naoyuki ; Okamoto, Kazumasa ; Oshima, Akihiro ; Tagawa, Seiichi ; Washio, Masakazu. / Nano-fabrication and functionalization of crosslinked PTFE using focused ion beam. In: Journal of Photopolymer Science and Technology. 2009 ; Vol. 22, No. 3. pp. 341-345.
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    AU - Tagawa, Seiichi

    AU - Washio, Masakazu

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