Nano-patterning of a TiO2-organic hybrid material using interference of surface plasmon on aluminum

Hiroyo Segawa, Satoru Inoue, Minoru Osada, Yoshihiko Takeda

Research output: Contribution to journalArticlepeer-review

2 Citations (Scopus)


Nano patterns of a TiO2-organic hybrid material have been fabricated by interference of surface plasmon on aluminum. The TiO 2-organic hybrid materials were prepared by the sol-gel method, and were irradiated through an aluminum mask by a UV light. After the unreacted parts were removed, patterns were obtained on the films. The patterns of lines approximately 300 nm in width and with a sub-100-nm height were obtained by controlling the UV irradiation time. It was confirmed that the patterns changed to anatase patterns by sintering at temperatures above 450 °C.

Original languageEnglish
Pages (from-to)232-238
Number of pages7
JournalJournal of Photochemistry and Photobiology A: Chemistry
Issue number2-3
Publication statusPublished - 2011 Jun 25
Externally publishedYes


  • Ceramic
  • Interference
  • Nano-patterning
  • Organic-inorganic hybrid materials
  • Surface plasmon

ASJC Scopus subject areas

  • Chemistry(all)
  • Chemical Engineering(all)
  • Physics and Astronomy(all)


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