Nanodevice fabrication on hydrogenated diamond surface using atomic force microscope

Minoru Tachiki, Tohru Fukuda, Hokuto Seo, Kenta Sugata, Tokishige Banno, Hitoshi Umezawa, Hiroshi Kawarada

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    2 Citations (Scopus)

    Abstract

    Nanofabrication on a hydrogen-terminated diamond surface is performed using an atomic force microscope (AFM) anodization. Locally insulated areas less than 30 nm are successfully obtained. Side-gated field effect transistors (FETs) are fabricated using the local anodization, and they operate successfully. Single hole transistors composed of one side-gated FET and two tunneling junctions are also fabricated and operate at liquid nitrogen temperature (77 K).

    Original languageEnglish
    Title of host publicationMaterials Research Society Symposium - Proceedings
    EditorsJ Robertson, T Friedmann, D Geohegan, D Luzzi, R Ruoff
    Volume675
    Publication statusPublished - 2001
    EventNanotubes, Fullerenes, Nanostructured and Disordered Carbon - San Francisco, CA, United States
    Duration: 2001 Apr 172001 Apr 20

    Other

    OtherNanotubes, Fullerenes, Nanostructured and Disordered Carbon
    CountryUnited States
    CitySan Francisco, CA
    Period01/4/1701/4/20

    Fingerprint

    Diamond
    Field effect transistors
    Diamonds
    Microscopes
    Fabrication
    Liquid nitrogen
    Nanotechnology
    Hydrogen
    Transistors
    Temperature

    ASJC Scopus subject areas

    • Electronic, Optical and Magnetic Materials

    Cite this

    Tachiki, M., Fukuda, T., Seo, H., Sugata, K., Banno, T., Umezawa, H., & Kawarada, H. (2001). Nanodevice fabrication on hydrogenated diamond surface using atomic force microscope. In J. Robertson, T. Friedmann, D. Geohegan, D. Luzzi, & R. Ruoff (Eds.), Materials Research Society Symposium - Proceedings (Vol. 675)

    Nanodevice fabrication on hydrogenated diamond surface using atomic force microscope. / Tachiki, Minoru; Fukuda, Tohru; Seo, Hokuto; Sugata, Kenta; Banno, Tokishige; Umezawa, Hitoshi; Kawarada, Hiroshi.

    Materials Research Society Symposium - Proceedings. ed. / J Robertson; T Friedmann; D Geohegan; D Luzzi; R Ruoff. Vol. 675 2001.

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    Tachiki, M, Fukuda, T, Seo, H, Sugata, K, Banno, T, Umezawa, H & Kawarada, H 2001, Nanodevice fabrication on hydrogenated diamond surface using atomic force microscope. in J Robertson, T Friedmann, D Geohegan, D Luzzi & R Ruoff (eds), Materials Research Society Symposium - Proceedings. vol. 675, Nanotubes, Fullerenes, Nanostructured and Disordered Carbon, San Francisco, CA, United States, 01/4/17.
    Tachiki M, Fukuda T, Seo H, Sugata K, Banno T, Umezawa H et al. Nanodevice fabrication on hydrogenated diamond surface using atomic force microscope. In Robertson J, Friedmann T, Geohegan D, Luzzi D, Ruoff R, editors, Materials Research Society Symposium - Proceedings. Vol. 675. 2001
    Tachiki, Minoru ; Fukuda, Tohru ; Seo, Hokuto ; Sugata, Kenta ; Banno, Tokishige ; Umezawa, Hitoshi ; Kawarada, Hiroshi. / Nanodevice fabrication on hydrogenated diamond surface using atomic force microscope. Materials Research Society Symposium - Proceedings. editor / J Robertson ; T Friedmann ; D Geohegan ; D Luzzi ; R Ruoff. Vol. 675 2001.
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    AU - Seo, Hokuto

    AU - Sugata, Kenta

    AU - Banno, Tokishige

    AU - Umezawa, Hitoshi

    AU - Kawarada, Hiroshi

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