Nanofabrication on hydrogen-terminated diamond surfaces by atomic force microscope probe-induced oxidation

Minoru Tachiki, Tohru Fukuda, Kenta Sugata, Hokuto Seo, Hitoshi Umezawa, Hiroshi Kawarada

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    Field-assisted local oxidation on a hydrogen-terminated (001) diamond surface was performed using an atomic force microscope (AFM). Anodic oxidation by a surface water meniscus layer is suggested to account for this oxidation process. Through the oxygenated area, Fowler-Nordheim (F-N) tunneling current was observed. The difference in electron affinity between the hydrogen-terminated surface and the oxygenated area was confirmed by scanning electron microscopic (SEM) observations.

    Original languageEnglish
    Pages (from-to)4631-4632
    Number of pages2
    JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
    Issue number7 B
    Publication statusPublished - 2000



    • AFM
    • Diamond
    • Electron affinity
    • Hydrogen termination
    • SPM
    • Surface conduction

    ASJC Scopus subject areas

    • Physics and Astronomy (miscellaneous)

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