Nanofabrication on hydrogen-terminated diamond surfaces by atomic force microscope probe-induced oxidation

Minoru Tachiki, Tohru Fukuda, Kenta Sugata, Hokuto Seo, Hitoshi Umezawa, Hiroshi Kawarada

Research output: Contribution to journalArticlepeer-review

51 Citations (Scopus)

Abstract

Field-assisted local oxidation on a hydrogen-terminated (001) diamond surface was performed using an atomic force microscope (AFM). Anodic oxidation by a surface water meniscus layer is suggested to account for this oxidation process. Through the oxygenated area, Fowler-Nordheim (F-N) tunneling current was observed. The difference in electron affinity between the hydrogen-terminated surface and the oxygenated area was confirmed by scanning electron microscopic (SEM) observations.

Original languageEnglish
Pages (from-to)4631-4632
Number of pages2
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume39
Issue number7 B
DOIs
Publication statusPublished - 2000

Keywords

  • AFM
  • Diamond
  • Electron affinity
  • Hydrogen termination
  • SPM
  • Surface conduction

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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