Nanopatterning of hydroxy-terminated self-assembled monolayer taking advantage of terminal group modification

Takeo Miyake, Takashi Tanii, Koichi Kato, Takumi Hosaka, Yuzo Kanari, Hironori Sonobe, Iwao Ohdomari

Research output: Contribution to journalArticle

10 Citations (Scopus)

Abstract

The feasibility of using an octenyltrimethoxysilane (OCS) self-assembled monolayer (SAM) as a high-resolution electron beam (EB) resist is investigated. The vinyl groups of the OCS SAM can be modified into hydroxy groups, which are useful for biochip fabrication. The hydroxy-modified OCS SAM exhibits higher sensitivity than a vinyl-terminated one. By using the hydroxy-modified OCS SAM as an EB resist, a miniaturized pattern of 18 nm is achieved. Since the hydroxy-modified OCS SAM is repellent to many proteins, this methodology can be useful for the fabrication of protein-immobilizing templates of a molecular scale.

Original languageEnglish
Pages (from-to)361-364
Number of pages4
JournalChemical Physics Letters
Volume426
Issue number4-6
DOIs
Publication statusPublished - 2006 Aug 4

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Self assembled monolayers
electron beams
proteins
fabrication
templates
methodology
Electron beams
sensitivity
high resolution
Biochips
Fabrication
Proteins

ASJC Scopus subject areas

  • Physical and Theoretical Chemistry
  • Spectroscopy
  • Atomic and Molecular Physics, and Optics
  • Surfaces and Interfaces
  • Condensed Matter Physics

Cite this

Nanopatterning of hydroxy-terminated self-assembled monolayer taking advantage of terminal group modification. / Miyake, Takeo; Tanii, Takashi; Kato, Koichi; Hosaka, Takumi; Kanari, Yuzo; Sonobe, Hironori; Ohdomari, Iwao.

In: Chemical Physics Letters, Vol. 426, No. 4-6, 04.08.2006, p. 361-364.

Research output: Contribution to journalArticle

Miyake, Takeo ; Tanii, Takashi ; Kato, Koichi ; Hosaka, Takumi ; Kanari, Yuzo ; Sonobe, Hironori ; Ohdomari, Iwao. / Nanopatterning of hydroxy-terminated self-assembled monolayer taking advantage of terminal group modification. In: Chemical Physics Letters. 2006 ; Vol. 426, No. 4-6. pp. 361-364.
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