Nanopatterning of hydroxy-terminated self-assembled monolayer taking advantage of terminal group modification

Takeo Miyake; Takashi Tanii; Koichi Kato; Takumi Hosaka; Yuzo Kanari; Hironori Sonobe; Iwao Ohdomari

doi:10.1016/j.cplett.2006.05.074

Nanopatterning of hydroxy-terminated self-assembled monolayer taking advantage of terminal group modification

Takeo Miyake, Takashi Tanii, Koichi Kato, Takumi Hosaka, Yuzo Kanari, Hironori Sonobe, Iwao Ohdomari

Research output: Contribution to journal › Article › peer-review

10 Citations (Scopus)

Abstract

The feasibility of using an octenyltrimethoxysilane (OCS) self-assembled monolayer (SAM) as a high-resolution electron beam (EB) resist is investigated. The vinyl groups of the OCS SAM can be modified into hydroxy groups, which are useful for biochip fabrication. The hydroxy-modified OCS SAM exhibits higher sensitivity than a vinyl-terminated one. By using the hydroxy-modified OCS SAM as an EB resist, a miniaturized pattern of 18 nm is achieved. Since the hydroxy-modified OCS SAM is repellent to many proteins, this methodology can be useful for the fabrication of protein-immobilizing templates of a molecular scale.

Original language	English
Pages (from-to)	361-364
Number of pages	4
Journal	Chemical Physics Letters
Volume	426
Issue number	4-6
DOIs	https://doi.org/10.1016/j.cplett.2006.05.074
Publication status	Published - 2006 Aug 4

ASJC Scopus subject areas

Physics and Astronomy(all)
Physical and Theoretical Chemistry

Access to Document

10.1016/j.cplett.2006.05.074

Fingerprint Dive into the research topics of 'Nanopatterning of hydroxy-terminated self-assembled monolayer taking advantage of terminal group modification'. Together they form a unique fingerprint.

Cite this

@article{37bc7971a495448d83bb9382b4bd3eab,

title = "Nanopatterning of hydroxy-terminated self-assembled monolayer taking advantage of terminal group modification",

abstract = "The feasibility of using an octenyltrimethoxysilane (OCS) self-assembled monolayer (SAM) as a high-resolution electron beam (EB) resist is investigated. The vinyl groups of the OCS SAM can be modified into hydroxy groups, which are useful for biochip fabrication. The hydroxy-modified OCS SAM exhibits higher sensitivity than a vinyl-terminated one. By using the hydroxy-modified OCS SAM as an EB resist, a miniaturized pattern of 18 nm is achieved. Since the hydroxy-modified OCS SAM is repellent to many proteins, this methodology can be useful for the fabrication of protein-immobilizing templates of a molecular scale.",

author = "Takeo Miyake and Takashi Tanii and Koichi Kato and Takumi Hosaka and Yuzo Kanari and Hironori Sonobe and Iwao Ohdomari",

year = "2006",

month = aug,

day = "4",

doi = "10.1016/j.cplett.2006.05.074",

language = "English",

volume = "426",

pages = "361--364",

journal = "Chemical Physics Letters",

issn = "0009-2614",

publisher = "Elsevier",

number = "4-6",

}

TY - JOUR

T1 - Nanopatterning of hydroxy-terminated self-assembled monolayer taking advantage of terminal group modification

AU - Miyake, Takeo

AU - Tanii, Takashi

AU - Kato, Koichi

AU - Hosaka, Takumi

AU - Kanari, Yuzo

AU - Sonobe, Hironori

AU - Ohdomari, Iwao

PY - 2006/8/4

Y1 - 2006/8/4

N2 - The feasibility of using an octenyltrimethoxysilane (OCS) self-assembled monolayer (SAM) as a high-resolution electron beam (EB) resist is investigated. The vinyl groups of the OCS SAM can be modified into hydroxy groups, which are useful for biochip fabrication. The hydroxy-modified OCS SAM exhibits higher sensitivity than a vinyl-terminated one. By using the hydroxy-modified OCS SAM as an EB resist, a miniaturized pattern of 18 nm is achieved. Since the hydroxy-modified OCS SAM is repellent to many proteins, this methodology can be useful for the fabrication of protein-immobilizing templates of a molecular scale.

AB - The feasibility of using an octenyltrimethoxysilane (OCS) self-assembled monolayer (SAM) as a high-resolution electron beam (EB) resist is investigated. The vinyl groups of the OCS SAM can be modified into hydroxy groups, which are useful for biochip fabrication. The hydroxy-modified OCS SAM exhibits higher sensitivity than a vinyl-terminated one. By using the hydroxy-modified OCS SAM as an EB resist, a miniaturized pattern of 18 nm is achieved. Since the hydroxy-modified OCS SAM is repellent to many proteins, this methodology can be useful for the fabrication of protein-immobilizing templates of a molecular scale.

UR - http://www.scopus.com/inward/record.url?scp=33746033380&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=33746033380&partnerID=8YFLogxK

U2 - 10.1016/j.cplett.2006.05.074

DO - 10.1016/j.cplett.2006.05.074

M3 - Article

AN - SCOPUS:33746033380

VL - 426

SP - 361

EP - 364

JO - Chemical Physics Letters

JF - Chemical Physics Letters

SN - 0009-2614

IS - 4-6

ER -