Nanoscale modification of the hydrogen-terminated diamond surface using atomic force microscope

Kenta Sugata, Minoru Tachiki, Tohru Fukuda, Hokuto Seo, Hiroshi Kawarada

    Research output: Contribution to journalArticle

    11 Citations (Scopus)

    Abstract

    Local insulation on the hydrogen-terminated homoepitaxial diamond (001) surface was performed using an atomic force microscope (AFM). The mechanism is analogous to electrochemical anodic oxidation in which the sample acts as an anode while the AFM tip acts as a cathode and the water layer from the atmosphere between the tip and the sample surface works as the electrolyte. The current measured during insulation indicates the anodization characteristics of the process. The surface modification has been found to be strongly dependent on the electric field between the sample and the tip. We also demonstrate the modification with the alternating current (AC) voltage bias. This method prevents buildup of space charge during modification and leads to the increase of the modified line width compared with the static voltage bias. Under proper conditions, such as suitable writing speed and bias voltage, the minimum line width reaches 35 nm in the case of AC bias.

    Original languageEnglish
    Pages (from-to)4983-4986
    Number of pages4
    JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
    Volume41
    Issue number7 B
    Publication statusPublished - 2002 Jul

    Fingerprint

    Bias voltage
    Diamonds
    Microscopes
    diamonds
    microscopes
    Linewidth
    Hydrogen
    Insulation
    hydrogen
    insulation
    alternating current
    electric potential
    Bias currents
    Electrochemical oxidation
    Anodic oxidation
    Electric space charge
    Surface treatment
    Anodes
    Cathodes
    Electrolytes

    Keywords

    • AFM
    • Anodic oxidation
    • Diamond
    • Insulation
    • SPM

    ASJC Scopus subject areas

    • Physics and Astronomy (miscellaneous)

    Cite this

    Nanoscale modification of the hydrogen-terminated diamond surface using atomic force microscope. / Sugata, Kenta; Tachiki, Minoru; Fukuda, Tohru; Seo, Hokuto; Kawarada, Hiroshi.

    In: Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, Vol. 41, No. 7 B, 07.2002, p. 4983-4986.

    Research output: Contribution to journalArticle

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