Nanostructural evolution in non-epitaxial growth of thin films

Minghui Hu, Suguru Noda, Hiroshi Komiyama

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The initial growth of non-epitaxial thin films was studied and discussed using the concept that thermodynamics controls the unit-structure within the surface diffusion length of deposits, whereas kinetics controls the ensemble-structure on a large scale. Three basic topics, growth mode (island shape), crystalline (island inner) structure, time-dependent properties of island ensemble (island size, distance, and density), are summarized based on the theoretical investigation of thin film growth of metals on TiO2, and the experimental study of Cu and Cr thin film growth on SiO2. This study provides fundamental understanding of nanostructural control during thin film growth, and further can be applied to various advanced devices for electronics, photonics, catalysis, and energy applications.

Original languageEnglish
Title of host publicationNanostructured and Patterned Materials for Information Storage
PublisherMaterials Research Society
Pages26-31
Number of pages6
ISBN (Print)9781604234138
DOIs
Publication statusPublished - 2006
Externally publishedYes
Event2006 MRS Fall Meeting - Boston, MA, United States
Duration: 2006 Nov 272006 Nov 30

Publication series

NameMaterials Research Society Symposium Proceedings
Volume961
ISSN (Print)0272-9172

Other

Other2006 MRS Fall Meeting
CountryUnited States
CityBoston, MA
Period06/11/2706/11/30

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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