Nanostructural evolution in non-epitaxial growth of thin films

Minghui Hu, Suguru Noda, Hiroshi Komiyama

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The initial growth of non-epitaxial thin films was studied and discussed using the concept that thermodynamics controls the unit-structure within the surface diffusion length of deposits, whereas kinetics controls the ensemble-structure on a large scale. Three basic topics, growth mode (island shape), crystalline (island inner) structure, time-dependent properties of island ensemble (island size, distance, and density), are summarized based on the theoretical investigation of thin film growth of metals on TiO2, and the experimental study of Cu and Cr thin film growth on SiO2. This study provides fundamental understanding of nanostructural control during thin film growth, and further can be applied to various advanced devices for electronics, photonics, catalysis, and energy applications.

Original languageEnglish
Title of host publicationMaterials Research Society Symposium Proceedings
Pages26-31
Number of pages6
Volume961
Publication statusPublished - 2006
Externally publishedYes
Event2006 MRS Fall Meeting - Boston, MA
Duration: 2006 Nov 272006 Dec 1

Other

Other2006 MRS Fall Meeting
CityBoston, MA
Period06/11/2706/12/1

Fingerprint

Film growth
Thin films
Surface diffusion
Photonics
Catalysis
Electronic equipment
Deposits
Metals
Thermodynamics
Crystalline materials
Kinetics

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials

Cite this

Hu, M., Noda, S., & Komiyama, H. (2006). Nanostructural evolution in non-epitaxial growth of thin films. In Materials Research Society Symposium Proceedings (Vol. 961, pp. 26-31)

Nanostructural evolution in non-epitaxial growth of thin films. / Hu, Minghui; Noda, Suguru; Komiyama, Hiroshi.

Materials Research Society Symposium Proceedings. Vol. 961 2006. p. 26-31.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Hu, M, Noda, S & Komiyama, H 2006, Nanostructural evolution in non-epitaxial growth of thin films. in Materials Research Society Symposium Proceedings. vol. 961, pp. 26-31, 2006 MRS Fall Meeting, Boston, MA, 06/11/27.
Hu M, Noda S, Komiyama H. Nanostructural evolution in non-epitaxial growth of thin films. In Materials Research Society Symposium Proceedings. Vol. 961. 2006. p. 26-31
Hu, Minghui ; Noda, Suguru ; Komiyama, Hiroshi. / Nanostructural evolution in non-epitaxial growth of thin films. Materials Research Society Symposium Proceedings. Vol. 961 2006. pp. 26-31
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