Nanovoid formation through the annealing of amorphous Al2O 3 and WO3 films

R. Nakamura; T. Shudo; A. Hirata; M. Ishimaru; H. Nakajima

doi:10.1016/j.scriptamat.2010.09.043

Nanovoid formation through the annealing of amorphous Al₂O ₃ and WO₃ films

R. Nakamura^*, T. Shudo, A. Hirata, M. Ishimaru, H. Nakajima

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

18 Citations (Scopus)

Abstract

A high density of nanovoids between 2 and 13 nm in size was produced during the crystallization process when amorphous Al₂O₃ and WO₃, which are 20-30% lower in density than their crystalline phases, were annealed. By contrast, no formation or growth of nanovoids was observed during the crystallization of amorphous TiO₂, which has a density 2% lower than its crystalline phase. These results suggest that large differences in density between amorphous and crystalline oxides can be utilized to produce nanoporous structures.

Original language	English
Pages (from-to)	197-200
Number of pages	4
Journal	Scripta Materialia
Volume	64
Issue number	2
DOIs	https://doi.org/10.1016/j.scriptamat.2010.09.043
Publication status	Published - 2011 Jan
Externally published	Yes

Keywords

Amorphous
Crystallization
Nanoporous
Oxides
TEM

ASJC Scopus subject areas

Materials Science(all)
Condensed Matter Physics
Mechanics of Materials
Mechanical Engineering
Metals and Alloys

Access to Document

10.1016/j.scriptamat.2010.09.043

Cite this

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title = "Nanovoid formation through the annealing of amorphous Al2O 3 and WO3 films",

abstract = "A high density of nanovoids between 2 and 13 nm in size was produced during the crystallization process when amorphous Al2O3 and WO3, which are 20-30% lower in density than their crystalline phases, were annealed. By contrast, no formation or growth of nanovoids was observed during the crystallization of amorphous TiO2, which has a density 2% lower than its crystalline phase. These results suggest that large differences in density between amorphous and crystalline oxides can be utilized to produce nanoporous structures.",

keywords = "Amorphous, Crystallization, Nanoporous, Oxides, TEM",

author = "R. Nakamura and T. Shudo and A. Hirata and M. Ishimaru and H. Nakajima",

note = "Funding Information: The authors thank Emeritus Prof. H. Mori and Mr. E. Taguchi of Research Center for Ultra-High Voltage Electron Microscopy, Osaka University, for carrying out the TEM observations. This work was supported by Grant-in-Aid for Young Scientists (B) (No. 21760556) and also by Priority Assistance for the Formation of World Wide Renowned Centers of Research – The Global COE Program (Project: Center of Excellence for Advanced Structural and Functional Materials Design), from the Ministry of Education, Culture, Sports, Science and Technology, Japan .",

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AU - Nakamura, R.

AU - Shudo, T.

AU - Hirata, A.

AU - Ishimaru, M.

AU - Nakajima, H.

N1 - Funding Information: The authors thank Emeritus Prof. H. Mori and Mr. E. Taguchi of Research Center for Ultra-High Voltage Electron Microscopy, Osaka University, for carrying out the TEM observations. This work was supported by Grant-in-Aid for Young Scientists (B) (No. 21760556) and also by Priority Assistance for the Formation of World Wide Renowned Centers of Research – The Global COE Program (Project: Center of Excellence for Advanced Structural and Functional Materials Design), from the Ministry of Education, Culture, Sports, Science and Technology, Japan .

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N2 - A high density of nanovoids between 2 and 13 nm in size was produced during the crystallization process when amorphous Al2O3 and WO3, which are 20-30% lower in density than their crystalline phases, were annealed. By contrast, no formation or growth of nanovoids was observed during the crystallization of amorphous TiO2, which has a density 2% lower than its crystalline phase. These results suggest that large differences in density between amorphous and crystalline oxides can be utilized to produce nanoporous structures.

AB - A high density of nanovoids between 2 and 13 nm in size was produced during the crystallization process when amorphous Al2O3 and WO3, which are 20-30% lower in density than their crystalline phases, were annealed. By contrast, no formation or growth of nanovoids was observed during the crystallization of amorphous TiO2, which has a density 2% lower than its crystalline phase. These results suggest that large differences in density between amorphous and crystalline oxides can be utilized to produce nanoporous structures.

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KW - Crystallization

KW - Nanoporous

KW - Oxides

KW - TEM

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