Abstract
Because of its good mechanical properties and its smooth surface, the bulk metallic glass Zr 46.8Ti 8.2Cu 7.5Ni 10Be 27.5 (V4) is a suitable material for microcomponents under mechanical stress. Since this glass is very stable to crystallization it allows for a near-net shape production of micro-components by forging the glass in the super-plastic state under small load at temperatures above the glass transition. If the V4 glass is pressed in deep-etched Si dies at a pressure of 5 MPa at 653 K or in NiCo dies manufactured according to the UV LIGA process it becomes possible to produce microcomponents up to 500 μm in thickness with detail dimensions of less than 50 μm at a high precision and surface finish.
| Original language | German |
|---|---|
| Pages (from-to) | 215-223 |
| Number of pages | 9 |
| Journal | Praktische Metallographie/Practical Metallography |
| Volume | 43 |
| Issue number | 5 |
| Publication status | Published - 2006 May |
| Externally published | Yes |
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ASJC Scopus subject areas
- Metals and Alloys
Cite this
Endformnahe mikrobauteile durch superplastische umformung von metallischem massivglas. / Macht, Michael Peter; Zumkley, Thomas; Suzuki, Shinsuke; Mechler, Stefan.
In: Praktische Metallographie/Practical Metallography, Vol. 43, No. 5, 05.2006, p. 215-223.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - Endformnahe mikrobauteile durch superplastische umformung von metallischem massivglas
AU - Macht, Michael Peter
AU - Zumkley, Thomas
AU - Suzuki, Shinsuke
AU - Mechler, Stefan
PY - 2006/5
Y1 - 2006/5
N2 - Because of its good mechanical properties and its smooth surface, the bulk metallic glass Zr 46.8Ti 8.2Cu 7.5Ni 10Be 27.5 (V4) is a suitable material for microcomponents under mechanical stress. Since this glass is very stable to crystallization it allows for a near-net shape production of micro-components by forging the glass in the super-plastic state under small load at temperatures above the glass transition. If the V4 glass is pressed in deep-etched Si dies at a pressure of 5 MPa at 653 K or in NiCo dies manufactured according to the UV LIGA process it becomes possible to produce microcomponents up to 500 μm in thickness with detail dimensions of less than 50 μm at a high precision and surface finish.
AB - Because of its good mechanical properties and its smooth surface, the bulk metallic glass Zr 46.8Ti 8.2Cu 7.5Ni 10Be 27.5 (V4) is a suitable material for microcomponents under mechanical stress. Since this glass is very stable to crystallization it allows for a near-net shape production of micro-components by forging the glass in the super-plastic state under small load at temperatures above the glass transition. If the V4 glass is pressed in deep-etched Si dies at a pressure of 5 MPa at 653 K or in NiCo dies manufactured according to the UV LIGA process it becomes possible to produce microcomponents up to 500 μm in thickness with detail dimensions of less than 50 μm at a high precision and surface finish.
UR - http://www.scopus.com/inward/record.url?scp=33744466068&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=33744466068&partnerID=8YFLogxK
M3 - Article
VL - 43
SP - 215
EP - 223
JO - Praktische Metallographie/Practical Metallography
JF - Praktische Metallographie/Practical Metallography
SN - 0032-678X
IS - 5
ER -