Endformnahe mikrobauteile durch superplastische umformung von metallischem massivglas

Translated title of the contribution: Near-net shape microcomponents obtained by superplastic forging of bulk metallic glass

Michael Peter Macht, Thomas Zumkley, Shinsuke Suzuki, Stefan Mechler

Research output: Contribution to journalArticle

2 Citations (Scopus)


Because of its good mechanical properties and its smooth surface, the bulk metallic glass Zr 46.8Ti 8.2Cu 7.5Ni 10Be 27.5 (V4) is a suitable material for microcomponents under mechanical stress. Since this glass is very stable to crystallization it allows for a near-net shape production of micro-components by forging the glass in the super-plastic state under small load at temperatures above the glass transition. If the V4 glass is pressed in deep-etched Si dies at a pressure of 5 MPa at 653 K or in NiCo dies manufactured according to the UV LIGA process it becomes possible to produce microcomponents up to 500 μm in thickness with detail dimensions of less than 50 μm at a high precision and surface finish.

Original languageGerman
Pages (from-to)215-223
Number of pages9
JournalPraktische Metallographie/Practical Metallography
Issue number5
Publication statusPublished - 2006 May 1


ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanics of Materials
  • Metals and Alloys

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