New cell technology for the scalable BST capacitor using damascene-formed pedestal electrode with a [Pt-Ir] alloy coating

H. Itoh, Y. Tsunemine, A. Yutani, T. Okudaira, K. Kashihara, Masahide Inuishi, M. Yamamuka, T. Kawahara, T. Horikawa, T. Ohmori, S. Satoh

Research output: Contribution to journalArticle

3 Citations (Scopus)

Abstract

A scalabale pedestal cell technology has been successfully developed for the BST capacitor by introducing the damascene scheme into the pedestal electrode formation and by employing [Pt-Ir] alloy for coating the pedestal electrode. With a PVD-BST liner as the blanket nucleating layer and as the barrier layer against the destructive oxidant, the MOCVD-BST functions in prime condition on the storage node developed.

Original languageEnglish
Pages (from-to)106-107
Number of pages2
JournalUnknown Journal
Publication statusPublished - 2000
Externally publishedYes

Fingerprint

capacitors
Capacitors
coatings
Coatings
Electrodes
electrodes
blankets
Metallorganic chemical vapor deposition
Physical vapor deposition
linings
barrier layers
cells
Oxidants
metalorganic chemical vapor deposition

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

Cite this

Itoh, H., Tsunemine, Y., Yutani, A., Okudaira, T., Kashihara, K., Inuishi, M., ... Satoh, S. (2000). New cell technology for the scalable BST capacitor using damascene-formed pedestal electrode with a [Pt-Ir] alloy coating. Unknown Journal, 106-107.

New cell technology for the scalable BST capacitor using damascene-formed pedestal electrode with a [Pt-Ir] alloy coating. / Itoh, H.; Tsunemine, Y.; Yutani, A.; Okudaira, T.; Kashihara, K.; Inuishi, Masahide; Yamamuka, M.; Kawahara, T.; Horikawa, T.; Ohmori, T.; Satoh, S.

In: Unknown Journal, 2000, p. 106-107.

Research output: Contribution to journalArticle

Itoh, H, Tsunemine, Y, Yutani, A, Okudaira, T, Kashihara, K, Inuishi, M, Yamamuka, M, Kawahara, T, Horikawa, T, Ohmori, T & Satoh, S 2000, 'New cell technology for the scalable BST capacitor using damascene-formed pedestal electrode with a [Pt-Ir] alloy coating', Unknown Journal, pp. 106-107.
Itoh, H. ; Tsunemine, Y. ; Yutani, A. ; Okudaira, T. ; Kashihara, K. ; Inuishi, Masahide ; Yamamuka, M. ; Kawahara, T. ; Horikawa, T. ; Ohmori, T. ; Satoh, S. / New cell technology for the scalable BST capacitor using damascene-formed pedestal electrode with a [Pt-Ir] alloy coating. In: Unknown Journal. 2000 ; pp. 106-107.
@article{723bd209589e4f04aead92abde59884e,
title = "New cell technology for the scalable BST capacitor using damascene-formed pedestal electrode with a [Pt-Ir] alloy coating",
abstract = "A scalabale pedestal cell technology has been successfully developed for the BST capacitor by introducing the damascene scheme into the pedestal electrode formation and by employing [Pt-Ir] alloy for coating the pedestal electrode. With a PVD-BST liner as the blanket nucleating layer and as the barrier layer against the destructive oxidant, the MOCVD-BST functions in prime condition on the storage node developed.",
author = "H. Itoh and Y. Tsunemine and A. Yutani and T. Okudaira and K. Kashihara and Masahide Inuishi and M. Yamamuka and T. Kawahara and T. Horikawa and T. Ohmori and S. Satoh",
year = "2000",
language = "English",
pages = "106--107",
journal = "Nuclear Physics A",
issn = "0375-9474",
publisher = "Elsevier",

}

TY - JOUR

T1 - New cell technology for the scalable BST capacitor using damascene-formed pedestal electrode with a [Pt-Ir] alloy coating

AU - Itoh, H.

AU - Tsunemine, Y.

AU - Yutani, A.

AU - Okudaira, T.

AU - Kashihara, K.

AU - Inuishi, Masahide

AU - Yamamuka, M.

AU - Kawahara, T.

AU - Horikawa, T.

AU - Ohmori, T.

AU - Satoh, S.

PY - 2000

Y1 - 2000

N2 - A scalabale pedestal cell technology has been successfully developed for the BST capacitor by introducing the damascene scheme into the pedestal electrode formation and by employing [Pt-Ir] alloy for coating the pedestal electrode. With a PVD-BST liner as the blanket nucleating layer and as the barrier layer against the destructive oxidant, the MOCVD-BST functions in prime condition on the storage node developed.

AB - A scalabale pedestal cell technology has been successfully developed for the BST capacitor by introducing the damascene scheme into the pedestal electrode formation and by employing [Pt-Ir] alloy for coating the pedestal electrode. With a PVD-BST liner as the blanket nucleating layer and as the barrier layer against the destructive oxidant, the MOCVD-BST functions in prime condition on the storage node developed.

UR - http://www.scopus.com/inward/record.url?scp=0033683019&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0033683019&partnerID=8YFLogxK

M3 - Article

AN - SCOPUS:0033683019

SP - 106

EP - 107

JO - Nuclear Physics A

JF - Nuclear Physics A

SN - 0375-9474

ER -