Abstract
A scalabale pedestal cell technology has been successfully developed for the BST capacitor by introducing the damascene scheme into the pedestal electrode formation and by employing [Pt-Ir] alloy for coating the pedestal electrode. With a PVD-BST liner as the blanket nucleating layer and as the barrier layer against the destructive oxidant, the MOCVD-BST functions in prime condition on the storage node developed.
| Original language | English |
|---|---|
| Pages (from-to) | 106-107 |
| Number of pages | 2 |
| Journal | Unknown Journal |
| Publication status | Published - 2000 |
| Externally published | Yes |
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ASJC Scopus subject areas
- Electrical and Electronic Engineering
Cite this
New cell technology for the scalable BST capacitor using damascene-formed pedestal electrode with a [Pt-Ir] alloy coating. / Itoh, H.; Tsunemine, Y.; Yutani, A.; Okudaira, T.; Kashihara, K.; Inuishi, Masahide; Yamamuka, M.; Kawahara, T.; Horikawa, T.; Ohmori, T.; Satoh, S.
In: Unknown Journal, 2000, p. 106-107.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - New cell technology for the scalable BST capacitor using damascene-formed pedestal electrode with a [Pt-Ir] alloy coating
AU - Itoh, H.
AU - Tsunemine, Y.
AU - Yutani, A.
AU - Okudaira, T.
AU - Kashihara, K.
AU - Inuishi, Masahide
AU - Yamamuka, M.
AU - Kawahara, T.
AU - Horikawa, T.
AU - Ohmori, T.
AU - Satoh, S.
PY - 2000
Y1 - 2000
N2 - A scalabale pedestal cell technology has been successfully developed for the BST capacitor by introducing the damascene scheme into the pedestal electrode formation and by employing [Pt-Ir] alloy for coating the pedestal electrode. With a PVD-BST liner as the blanket nucleating layer and as the barrier layer against the destructive oxidant, the MOCVD-BST functions in prime condition on the storage node developed.
AB - A scalabale pedestal cell technology has been successfully developed for the BST capacitor by introducing the damascene scheme into the pedestal electrode formation and by employing [Pt-Ir] alloy for coating the pedestal electrode. With a PVD-BST liner as the blanket nucleating layer and as the barrier layer against the destructive oxidant, the MOCVD-BST functions in prime condition on the storage node developed.
UR - http://www.scopus.com/inward/record.url?scp=0033683019&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=0033683019&partnerID=8YFLogxK
M3 - Article
AN - SCOPUS:0033683019
SP - 106
EP - 107
JO - Nuclear Physics A
JF - Nuclear Physics A
SN - 0375-9474
ER -