New dielectric nanomaterials fabricated from nanosheet technique

M. Osada, T. Sasaki

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

We present a novel procedure for fabricating high-k nanodielectrics by using of perovskite nanosheet (Ca 2-xSr xNb 3O 10) as a building block. We synthesized Ca 2-xSr xNb 3O 10 nanosheets by delaminating layered perovskites (KCa 2-xSr xNb 3O 10), and fabricated multilayer nanofilms on atomically flat SrRuO 3and Pt substrates by Langmuir-Blodgett method. Various microscopy techniques showed highly ordered lamellar structures, and electron energy loss spectroscopy revealed no detectable interdiffusion and strains at the interface between the layers and substrate. These nanofilms showed both high dielectric constant (>200) and low leakage current (< 10 -7 A/cm 2) even in films less than 5 nm thick. Our work thus provides a new recipe for designing nanodielectrics desirable for future high-k devices.

Original languageEnglish
Title of host publicationECS Transactions
Pages3-8
Number of pages6
Volume45
Edition3
DOIs
Publication statusPublished - 2012
Externally publishedYes
Event5th International Symposium on Dielectrics for Nanosystems: Materials Science, Processing, Reliability and Manufacturing - 221st ECS Meeting - Seattle, WA, United States
Duration: 2012 May 62012 May 10

Other

Other5th International Symposium on Dielectrics for Nanosystems: Materials Science, Processing, Reliability and Manufacturing - 221st ECS Meeting
CountryUnited States
CitySeattle, WA
Period12/5/612/5/10

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ASJC Scopus subject areas

  • Engineering(all)

Cite this

Osada, M., & Sasaki, T. (2012). New dielectric nanomaterials fabricated from nanosheet technique. In ECS Transactions (3 ed., Vol. 45, pp. 3-8) https://doi.org/10.1149/1.3700866