New ion counting system for laser sputtered neutral mass spectrometry

S. Ichimura*, H. Shimizu, K. Kokuban, H. Hashizume, K. Goto

*Corresponding author for this work

Research output: Contribution to journalConference articlepeer-review


In sputtered neutrals mass spectrometry (SNMS) with a laser for post-ionization a bunch of ions is generated within a short period corresponding to a laser pulse width (typically, a few tens of nanoseconds). The number of ions exceeds 100 under some conditions, so that a peak counting ability close to 1010 is necessary to detect all of them. The authors used an analog detection system for this purpose, but it was found to suffer from signal fluctuation, particularly when the primary ion beam current was low. They therefore developed a new counting system in which a bunch of ions incident on a microchannel plate is converted into photoradiating spots on a fluorescent screen. A charge coupled device camera records these spots and accumulates the signal for a (shutter opening) period. The signal is then transferred to a frame memory. Subsequently, a personal computer counts the 'events' in the frame memory.

Original languageEnglish
Pages (from-to)1788-1789
Number of pages2
Issue number7 -9 Pt3
Publication statusPublished - 1990
Externally publishedYes
EventSelected Proceedings of the 11th International Vacuum Congress - (IVC-11) and the 7th International Conference on Solid Surfaces - (ICSS-7) - Cologne, Ger
Duration: 1989 Sept 251989 Sept 29

ASJC Scopus subject areas

  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films


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