Abstract
Noncontact ultrasonic imaging of subsurface defects using a laser-ultrasonic technique was demonstrated. Pulsed laser irradiation was used for ultrasonic generation, and optical heterodyne interferometry was used for detection of ultrasonic vibration on the specimen surface. Bonded thin plates with character-shaped hallmarks with 1.5mm width on bonding layer were used as specimens. Imagings in ultrasonic transmission and reflection modes were performed, and imagings using not only XY-scanning of specimens but also a laser beam scanner were demonstrated. Ultrasonic images of hallmarks located 0.2mm below the specimen surface were obtained through the experiments.
| Original language | English |
|---|---|
| Pages (from-to) | 3075-3079 |
| Number of pages | 5 |
| Journal | Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers |
| Volume | 35 |
| Issue number | 5 B |
| Publication status | Published - 1996 |
| Externally published | Yes |
Keywords
- Heterodyne interferometer
- Laser-ultrasonic
- Microscopic ultrasonic imaging
- Noncontact ultrasonic measurement
- Nondestructive testing
- Subsurface defects
ASJC Scopus subject areas
- Physics and Astronomy (miscellaneous)
- Engineering(all)