Nonlithographic approach to nanostructure fabrication using a scanned electrospinning source

David Czaplewski*, Jun Kameoka, H. G. Craighead

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

28 Citations (Scopus)
Original languageEnglish
Pages (from-to)2994-2997
Number of pages4
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume21
Issue number6
DOIs
Publication statusPublished - 2003
Externally publishedYes

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Electrical and Electronic Engineering

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