Nonpolar AlBN (11 2- 0) and (1 1- 00) films were grown using flow-rate modulation epitaxy. The transmission electron diffraction and lattice image reflect the wurtzite crystal structure of an AlBN (11 2- 0) film. The boron compositions in AlBN (11 2- 0) and (1 1- 00) films (B∼2%), estimated by x-ray diffraction assuming the wurtzite structure, agree well with the compositions measured by secondary ion mass spectroscopy, indicating that boron atoms are incorporated exactly into the wurtzite lattice sites. The (11 2- 0) face is more promising than the (1 1- 00) one for the growth of nonpolar AlBN because it has fewer dangling bonds of nitrogen on the surface.
ASJC Scopus subject areas
- Physics and Astronomy (miscellaneous)