Nonvolatile three-terminal operation based on oxygen vacancy drift in a Pt/Ta2O5-x/Pt, Pt structure

Qi Wang, Yaomi Itoh, Tsuyoshi Hasegawa, Tohru Tsuruoka, Shu Yamaguchi, Satoshi Watanabe, Toshiro Hiramoto, Masakazu Aono

Research output: Contribution to journalArticle

7 Citations (Scopus)

Abstract

Nonvolatile three-terminal operation is demonstrated using a Pt/Ta 2O5-x/Pt, Pt structure, by controlling oxygen vacancy drift to make/annihilate a conductive channel between a source and a drain. The as-fabricated device is in an off-state. Application of a positive gate bias moves oxygen vacancies in a Ta2O5-x layer towards a channel region, making the channel region conductive. The conductive channel remains even after unloading the gate bias. Application of a negative gate bias, which moves the oxygen vacancies back towards the gate electrode, is required to turn off the device. The device shows a high ON/OFF ratio of up to 10 6.

Original languageEnglish
Article number233508
JournalApplied Physics Letters
Volume102
Issue number23
DOIs
Publication statusPublished - 2013 Jun 10
Externally publishedYes

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ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

Cite this

Nonvolatile three-terminal operation based on oxygen vacancy drift in a Pt/Ta2O5-x/Pt, Pt structure. / Wang, Qi; Itoh, Yaomi; Hasegawa, Tsuyoshi; Tsuruoka, Tohru; Yamaguchi, Shu; Watanabe, Satoshi; Hiramoto, Toshiro; Aono, Masakazu.

In: Applied Physics Letters, Vol. 102, No. 23, 233508, 10.06.2013.

Research output: Contribution to journalArticle

Wang, Q, Itoh, Y, Hasegawa, T, Tsuruoka, T, Yamaguchi, S, Watanabe, S, Hiramoto, T & Aono, M 2013, 'Nonvolatile three-terminal operation based on oxygen vacancy drift in a Pt/Ta2O5-x/Pt, Pt structure', Applied Physics Letters, vol. 102, no. 23, 233508. https://doi.org/10.1063/1.4811122
Wang, Qi ; Itoh, Yaomi ; Hasegawa, Tsuyoshi ; Tsuruoka, Tohru ; Yamaguchi, Shu ; Watanabe, Satoshi ; Hiramoto, Toshiro ; Aono, Masakazu. / Nonvolatile three-terminal operation based on oxygen vacancy drift in a Pt/Ta2O5-x/Pt, Pt structure. In: Applied Physics Letters. 2013 ; Vol. 102, No. 23.
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