Abstract
A normally closed microwave and micropump were fabricated on a silicon wafer by micromachining techniques. Normally closed microvalve has a silicon diaphragm and a small piezoelectric actuator to drive it. The controllable gas flow rate is from 0.1 ml/min to 85 ml/min at a gas pressure of 0.75 kgf/cm2. The micropump is a diaphragm-type pump which consists of two polysilicon one-way valves and a diaphragm driven by a small piezoelectric actuator. The maximum pumping flow rate and pressure are 20 μl/min and 780 mmH2O/cm2, respectively.
Original language | English |
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Pages | 29-34 |
Number of pages | 6 |
Publication status | Published - 1989 Dec 1 |
Externally published | Yes |
Event | Micro Electro Mechanical Systems: An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots - Salt Lake City, UT, USA Duration: 1989 Feb 20 → 1989 Feb 22 |
Other
Other | Micro Electro Mechanical Systems: An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots |
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City | Salt Lake City, UT, USA |
Period | 89/2/20 → 89/2/22 |
ASJC Scopus subject areas
- Engineering(all)