Normally close microvalve and micropump fabricated on a silicon wafer.

Masayoshi Esashi; Shuichi Shoji; Akira Nakano

Normally close microvalve and micropump fabricated on a silicon wafer.

Masayoshi Esashi^*, Shuichi Shoji, Akira Nakano

^*Corresponding author for this work

Research output: Contribution to conference › Paper › peer-review

28 Citations (Scopus)

Abstract

A normally closed microwave and micropump were fabricated on a silicon wafer by micromachining techniques. Normally closed microvalve has a silicon diaphragm and a small piezoelectric actuator to drive it. The controllable gas flow rate is from 0.1 ml/min to 85 ml/min at a gas pressure of 0.75 kgf/cm². The micropump is a diaphragm-type pump which consists of two polysilicon one-way valves and a diaphragm driven by a small piezoelectric actuator. The maximum pumping flow rate and pressure are 20 μl/min and 780 mmH₂O/cm², respectively.

Original language	English
Pages	29-34
Number of pages	6
Publication status	Published - 1989 Dec 1
Externally published	Yes
Event	Micro Electro Mechanical Systems: An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots - Salt Lake City, UT, USA Duration: 1989 Feb 20 → 1989 Feb 22

Other

Other	Micro Electro Mechanical Systems: An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots
City	Salt Lake City, UT, USA
Period	89/2/20 → 89/2/22

ASJC Scopus subject areas

Engineering(all)

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title = "Normally close microvalve and micropump fabricated on a silicon wafer.",

abstract = "A normally closed microwave and micropump were fabricated on a silicon wafer by micromachining techniques. Normally closed microvalve has a silicon diaphragm and a small piezoelectric actuator to drive it. The controllable gas flow rate is from 0.1 ml/min to 85 ml/min at a gas pressure of 0.75 kgf/cm2. The micropump is a diaphragm-type pump which consists of two polysilicon one-way valves and a diaphragm driven by a small piezoelectric actuator. The maximum pumping flow rate and pressure are 20 μl/min and 780 mmH2O/cm2, respectively.",

author = "Masayoshi Esashi and Shuichi Shoji and Akira Nakano",

year = "1989",

month = dec,

day = "1",

language = "English",

pages = "29--34",

note = "Micro Electro Mechanical Systems: An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots ; Conference date: 20-02-1989 Through 22-02-1989",

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TY - CONF

T1 - Normally close microvalve and micropump fabricated on a silicon wafer.

AU - Esashi, Masayoshi

AU - Shoji, Shuichi

AU - Nakano, Akira

PY - 1989/12/1

Y1 - 1989/12/1

N2 - A normally closed microwave and micropump were fabricated on a silicon wafer by micromachining techniques. Normally closed microvalve has a silicon diaphragm and a small piezoelectric actuator to drive it. The controllable gas flow rate is from 0.1 ml/min to 85 ml/min at a gas pressure of 0.75 kgf/cm2. The micropump is a diaphragm-type pump which consists of two polysilicon one-way valves and a diaphragm driven by a small piezoelectric actuator. The maximum pumping flow rate and pressure are 20 μl/min and 780 mmH2O/cm2, respectively.

AB - A normally closed microwave and micropump were fabricated on a silicon wafer by micromachining techniques. Normally closed microvalve has a silicon diaphragm and a small piezoelectric actuator to drive it. The controllable gas flow rate is from 0.1 ml/min to 85 ml/min at a gas pressure of 0.75 kgf/cm2. The micropump is a diaphragm-type pump which consists of two polysilicon one-way valves and a diaphragm driven by a small piezoelectric actuator. The maximum pumping flow rate and pressure are 20 μl/min and 780 mmH2O/cm2, respectively.

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M3 - Paper

AN - SCOPUS:0024860591

SP - 29

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T2 - Micro Electro Mechanical Systems: An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots

Y2 - 20 February 1989 through 22 February 1989

ER -

Normally close microvalve and micropump fabricated on a silicon wafer.

Abstract

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ASJC Scopus subject areas

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