Normally close microvalve and micropump fabricated on a silicon wafer.

Masayoshi Esashi, Shuichi Shoji, Akira Nakano

Research output: Chapter in Book/Report/Conference proceedingConference contribution

24 Citations (Scopus)

Abstract

A normally closed microwave and micropump were fabricated on a silicon wafer by micromachining techniques. Normally closed microvalve has a silicon diaphragm and a small piezoelectric actuator to drive it. The controllable gas flow rate is from 0.1 ml/min to 85 ml/min at a gas pressure of 0.75 kgf/cm2. The micropump is a diaphragm-type pump which consists of two polysilicon one-way valves and a diaphragm driven by a small piezoelectric actuator. The maximum pumping flow rate and pressure are 20 μl/min and 780 mmH2O/cm2, respectively.

Original languageEnglish
Title of host publicationMicro Electro Mech Sys Invest Micro Struct Sens Actuators Mach Rob
Editors Anon
Place of PublicationPiscataway, NJ, United States
PublisherPubl by IEEE
Pages29-34
Number of pages6
Publication statusPublished - 1989
Externally publishedYes
EventMicro Electro Mechanical Systems: An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots - Salt Lake City, UT, USA
Duration: 1989 Feb 201989 Feb 22

Other

OtherMicro Electro Mechanical Systems: An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots
CitySalt Lake City, UT, USA
Period89/2/2089/2/22

Fingerprint

Diaphragms
Silicon wafers
Piezoelectric actuators
Flow rate
Micromachining
Polysilicon
Flow of gases
Microwaves
Pumps
Silicon
Gases

ASJC Scopus subject areas

  • Engineering(all)

Cite this

Esashi, M., Shoji, S., & Nakano, A. (1989). Normally close microvalve and micropump fabricated on a silicon wafer. In Anon (Ed.), Micro Electro Mech Sys Invest Micro Struct Sens Actuators Mach Rob (pp. 29-34). Piscataway, NJ, United States: Publ by IEEE.

Normally close microvalve and micropump fabricated on a silicon wafer. / Esashi, Masayoshi; Shoji, Shuichi; Nakano, Akira.

Micro Electro Mech Sys Invest Micro Struct Sens Actuators Mach Rob. ed. / Anon. Piscataway, NJ, United States : Publ by IEEE, 1989. p. 29-34.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Esashi, M, Shoji, S & Nakano, A 1989, Normally close microvalve and micropump fabricated on a silicon wafer. in Anon (ed.), Micro Electro Mech Sys Invest Micro Struct Sens Actuators Mach Rob. Publ by IEEE, Piscataway, NJ, United States, pp. 29-34, Micro Electro Mechanical Systems: An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots, Salt Lake City, UT, USA, 89/2/20.
Esashi M, Shoji S, Nakano A. Normally close microvalve and micropump fabricated on a silicon wafer. In Anon, editor, Micro Electro Mech Sys Invest Micro Struct Sens Actuators Mach Rob. Piscataway, NJ, United States: Publ by IEEE. 1989. p. 29-34
Esashi, Masayoshi ; Shoji, Shuichi ; Nakano, Akira. / Normally close microvalve and micropump fabricated on a silicon wafer. Micro Electro Mech Sys Invest Micro Struct Sens Actuators Mach Rob. editor / Anon. Piscataway, NJ, United States : Publ by IEEE, 1989. pp. 29-34
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