Abstract
A normally closed microwave and micropump were fabricated on a silicon wafer by micromachining techniques. Normally closed microvalve has a silicon diaphragm and a small piezoelectric actuator to drive it. The controllable gas flow rate is from 0.1 ml/min to 85 ml/min at a gas pressure of 0.75 kgf/cm2. The micropump is a diaphragm-type pump which consists of two polysilicon one-way valves and a diaphragm driven by a small piezoelectric actuator. The maximum pumping flow rate and pressure are 20 μl/min and 780 mmH2O/cm2, respectively.
| Original language | English |
|---|---|
| Pages | 29-34 |
| Number of pages | 6 |
| Publication status | Published - 1989 Dec 1 |
| Externally published | Yes |
| Event | Micro Electro Mechanical Systems: An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots - Salt Lake City, UT, USA Duration: 1989 Feb 20 → 1989 Feb 22 |
Other
| Other | Micro Electro Mechanical Systems: An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots |
|---|---|
| City | Salt Lake City, UT, USA |
| Period | 89/2/20 → 89/2/22 |
ASJC Scopus subject areas
- Engineering(all)
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Esashi, M., Shoji, S., & Nakano, A. (1989). Normally close microvalve and micropump fabricated on a silicon wafer.. 29-34. Paper presented at Micro Electro Mechanical Systems: An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots, Salt Lake City, UT, USA, .