Normally close microvalve and micropump fabricated on a silicon wafer.

Masayoshi Esashi, Shuichi Shoji, Akira Nakano

Research output: Contribution to conferencePaper

24 Citations (Scopus)

Abstract

A normally closed microwave and micropump were fabricated on a silicon wafer by micromachining techniques. Normally closed microvalve has a silicon diaphragm and a small piezoelectric actuator to drive it. The controllable gas flow rate is from 0.1 ml/min to 85 ml/min at a gas pressure of 0.75 kgf/cm2. The micropump is a diaphragm-type pump which consists of two polysilicon one-way valves and a diaphragm driven by a small piezoelectric actuator. The maximum pumping flow rate and pressure are 20 μl/min and 780 mmH2O/cm2, respectively.

Original languageEnglish
Pages29-34
Number of pages6
Publication statusPublished - 1989 Dec 1
EventMicro Electro Mechanical Systems: An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots - Salt Lake City, UT, USA
Duration: 1989 Feb 201989 Feb 22

Other

OtherMicro Electro Mechanical Systems: An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots
CitySalt Lake City, UT, USA
Period89/2/2089/2/22

ASJC Scopus subject areas

  • Engineering(all)

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  • Cite this

    Esashi, M., Shoji, S., & Nakano, A. (1989). Normally close microvalve and micropump fabricated on a silicon wafer.. 29-34. Paper presented at Micro Electro Mechanical Systems: An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots, Salt Lake City, UT, USA, .