Abstract
A normally closed microwave and micropump were fabricated on a silicon wafer by micromachining techniques. Normally closed microvalve has a silicon diaphragm and a small piezoelectric actuator to drive it. The controllable gas flow rate is from 0.1 ml/min to 85 ml/min at a gas pressure of 0.75 kgf/cm2. The micropump is a diaphragm-type pump which consists of two polysilicon one-way valves and a diaphragm driven by a small piezoelectric actuator. The maximum pumping flow rate and pressure are 20 μl/min and 780 mmH2O/cm2, respectively.
| Original language | English |
|---|---|
| Title of host publication | Micro Electro Mech Sys Invest Micro Struct Sens Actuators Mach Rob |
| Editors | Anon |
| Place of Publication | Piscataway, NJ, United States |
| Publisher | Publ by IEEE |
| Pages | 29-34 |
| Number of pages | 6 |
| Publication status | Published - 1989 |
| Externally published | Yes |
| Event | Micro Electro Mechanical Systems: An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots - Salt Lake City, UT, USA Duration: 1989 Feb 20 → 1989 Feb 22 |
Other
| Other | Micro Electro Mechanical Systems: An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots |
|---|---|
| City | Salt Lake City, UT, USA |
| Period | 89/2/20 → 89/2/22 |
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ASJC Scopus subject areas
- Engineering(all)
Cite this
Normally close microvalve and micropump fabricated on a silicon wafer. / Esashi, Masayoshi; Shoji, Shuichi; Nakano, Akira.
Micro Electro Mech Sys Invest Micro Struct Sens Actuators Mach Rob. ed. / Anon. Piscataway, NJ, United States : Publ by IEEE, 1989. p. 29-34.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
}
TY - GEN
T1 - Normally close microvalve and micropump fabricated on a silicon wafer.
AU - Esashi, Masayoshi
AU - Shoji, Shuichi
AU - Nakano, Akira
PY - 1989
Y1 - 1989
N2 - A normally closed microwave and micropump were fabricated on a silicon wafer by micromachining techniques. Normally closed microvalve has a silicon diaphragm and a small piezoelectric actuator to drive it. The controllable gas flow rate is from 0.1 ml/min to 85 ml/min at a gas pressure of 0.75 kgf/cm2. The micropump is a diaphragm-type pump which consists of two polysilicon one-way valves and a diaphragm driven by a small piezoelectric actuator. The maximum pumping flow rate and pressure are 20 μl/min and 780 mmH2O/cm2, respectively.
AB - A normally closed microwave and micropump were fabricated on a silicon wafer by micromachining techniques. Normally closed microvalve has a silicon diaphragm and a small piezoelectric actuator to drive it. The controllable gas flow rate is from 0.1 ml/min to 85 ml/min at a gas pressure of 0.75 kgf/cm2. The micropump is a diaphragm-type pump which consists of two polysilicon one-way valves and a diaphragm driven by a small piezoelectric actuator. The maximum pumping flow rate and pressure are 20 μl/min and 780 mmH2O/cm2, respectively.
UR - http://www.scopus.com/inward/record.url?scp=0024860591&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=0024860591&partnerID=8YFLogxK
M3 - Conference contribution
AN - SCOPUS:0024860591
SP - 29
EP - 34
BT - Micro Electro Mech Sys Invest Micro Struct Sens Actuators Mach Rob
A2 - Anon, null
PB - Publ by IEEE
CY - Piscataway, NJ, United States
ER -