Normally close microvalve and micropump fabricated on a silicon wafer

Masayoshi Esashi; Shuichi Shoji; Akira Nakano

doi:10.1109/9780470545263.sect8

Normally close microvalve and micropump fabricated on a silicon wafer

Masayoshi Esashi, Shuichi Shoji, Akira Nakano

Research output: Chapter in Book/Report/Conference proceeding › Chapter

1 Citation (Scopus)

Abstract

A normally close microvalve and micropump were fabricated on a silicon wafer by micromachinlng techniques. Normally close microvalve has a silicon diaphragm and a small piezoelectric actuator to drive It. The controllable gas flow rate is from 0.1 ml/min to 85 ml/min at gas pressure of 0.75 kgf/cm². The micro pump is a diaphragm type pump which consists of two polysilicon oneway valves and a diaphragm driven by a small piezoelectric actuator. The maximum pumping flow rate and pressure are 20 ¼l/min and 780 mmH₂0/cm² respectively.

Original language	English
Title of host publication	Micromechanics and MEMS
Subtitle of host publication	Classic and Seminal Papers to 1990
Publisher	Wiley-IEEE Press
Pages	444-449
Number of pages	6
ISBN (Electronic)	9780470545263
ISBN (Print)	0780310853, 9780780310858
DOIs	https://doi.org/10.1109/9780470545263.sect8
Publication status	Published - 1997 Jan 1
Externally published	Yes

ASJC Scopus subject areas

Computer Science(all)
Engineering(all)
Physics and Astronomy(all)
Energy(all)

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AU - Shoji, Shuichi

AU - Nakano, Akira

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N2 - A normally close microvalve and micropump were fabricated on a silicon wafer by micromachinlng techniques. Normally close microvalve has a silicon diaphragm and a small piezoelectric actuator to drive It. The controllable gas flow rate is from 0.1 ml/min to 85 ml/min at gas pressure of 0.75 kgf/cm2. The micro pump is a diaphragm type pump which consists of two polysilicon oneway valves and a diaphragm driven by a small piezoelectric actuator. The maximum pumping flow rate and pressure are 20 ¼l/min and 780 mmH20/cm2 respectively.

AB - A normally close microvalve and micropump were fabricated on a silicon wafer by micromachinlng techniques. Normally close microvalve has a silicon diaphragm and a small piezoelectric actuator to drive It. The controllable gas flow rate is from 0.1 ml/min to 85 ml/min at gas pressure of 0.75 kgf/cm2. The micro pump is a diaphragm type pump which consists of two polysilicon oneway valves and a diaphragm driven by a small piezoelectric actuator. The maximum pumping flow rate and pressure are 20 ¼l/min and 780 mmH20/cm2 respectively.

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BT - Micromechanics and MEMS

PB - Wiley-IEEE Press

ER -

Normally close microvalve and micropump fabricated on a silicon wafer

Abstract

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