Normally close microvalve and micropump fabricated on a silicon wafer

Masayoshi Esashi; Shuichi Shoji; Akira Nakano

doi:10.1109/9780470545263.sect8

Normally close microvalve and micropump fabricated on a silicon wafer

Masayoshi Esashi, Shuichi Shoji, Akira Nakano

School of Fundamental Science and Engineering

Research output: Chapter in Book/Report/Conference proceeding › Chapter

1 Citation (Scopus)

Abstract

A normally close microvalve and micropump were fabricated on a silicon wafer by micromachinlng techniques. Normally close microvalve has a silicon diaphragm and a small piezoelectric actuator to drive It. The controllable gas flow rate is from 0.1 ml/min to 85 ml/min at gas pressure of 0.75 kgf/cm². The micro pump is a diaphragm type pump which consists of two polysilicon oneway valves and a diaphragm driven by a small piezoelectric actuator. The maximum pumping flow rate and pressure are 20 ¼l/min and 780 mmH₂0/cm² respectively.

Original language	English
Title of host publication	Micromechanics and MEMS
Subtitle of host publication	Classic and Seminal Papers to 1990
Publisher	Wiley-IEEE Press
Pages	444-449
Number of pages	6
ISBN (Electronic)	9780470545263
ISBN (Print)	0780310853, 9780780310858
DOIs	https://doi.org/10.1109/9780470545263.sect8
Publication status	Published - 1997 Jan 1

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ASJC Scopus subject areas

Computer Science(all)
Engineering(all)
Physics and Astronomy(all)
Energy(all)

Cite this

Esashi, M., Shoji, S., & Nakano, A. (1997). Normally close microvalve and micropump fabricated on a silicon wafer. In Micromechanics and MEMS: Classic and Seminal Papers to 1990 (pp. 444-449). Wiley-IEEE Press. https://doi.org/10.1109/9780470545263.sect8

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Access to Document

10.1109/9780470545263.sect8