Normally close microvalve and micropump fabricated on a silicon wafer

Masayoshi Esashi, Shuichi Shoji, Akira Nakano

Research output: Chapter in Book/Report/Conference proceedingChapter

1 Citation (Scopus)

Abstract

A normally close microvalve and micropump were fabricated on a silicon wafer by micromachinlng techniques. Normally close microvalve has a silicon diaphragm and a small piezoelectric actuator to drive It. The controllable gas flow rate is from 0.1 ml/min to 85 ml/min at gas pressure of 0.75 kgf/cm2. The micro pump is a diaphragm type pump which consists of two polysilicon oneway valves and a diaphragm driven by a small piezoelectric actuator. The maximum pumping flow rate and pressure are 20 ¼l/min and 780 mmH20/cm2 respectively.

Original languageEnglish
Title of host publicationMicromechanics and MEMS
Subtitle of host publicationClassic and Seminal Papers to 1990
PublisherJohn Wiley and Sons Inc.
Pages444-449
Number of pages6
ISBN (Electronic)9780470545263
ISBN (Print)0780310853, 9780780310858
DOIs
Publication statusPublished - 1997 Jan 1
Externally publishedYes

Fingerprint

diaphragms
Diaphragms
Silicon wafers
piezoelectric actuators
Piezoelectric actuators
wafers
silicon
flow velocity
Flow rate
Pumps
pumps
Polysilicon
gas pressure
gas flow
Flow of gases
pumping
Silicon
Gases

ASJC Scopus subject areas

  • Computer Science(all)
  • Engineering(all)
  • Physics and Astronomy(all)
  • Energy(all)

Cite this

Esashi, M., Shoji, S., & Nakano, A. (1997). Normally close microvalve and micropump fabricated on a silicon wafer. In Micromechanics and MEMS: Classic and Seminal Papers to 1990 (pp. 444-449). John Wiley and Sons Inc.. https://doi.org/10.1109/9780470545263.sect8

Normally close microvalve and micropump fabricated on a silicon wafer. / Esashi, Masayoshi; Shoji, Shuichi; Nakano, Akira.

Micromechanics and MEMS: Classic and Seminal Papers to 1990. John Wiley and Sons Inc., 1997. p. 444-449.

Research output: Chapter in Book/Report/Conference proceedingChapter

Esashi, M, Shoji, S & Nakano, A 1997, Normally close microvalve and micropump fabricated on a silicon wafer. in Micromechanics and MEMS: Classic and Seminal Papers to 1990. John Wiley and Sons Inc., pp. 444-449. https://doi.org/10.1109/9780470545263.sect8
Esashi M, Shoji S, Nakano A. Normally close microvalve and micropump fabricated on a silicon wafer. In Micromechanics and MEMS: Classic and Seminal Papers to 1990. John Wiley and Sons Inc. 1997. p. 444-449 https://doi.org/10.1109/9780470545263.sect8
Esashi, Masayoshi ; Shoji, Shuichi ; Nakano, Akira. / Normally close microvalve and micropump fabricated on a silicon wafer. Micromechanics and MEMS: Classic and Seminal Papers to 1990. John Wiley and Sons Inc., 1997. pp. 444-449
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