Abstract
A normally close microvalve and micropump were fabricated on a silicon wafer by micromachinlng techniques. Normally close microvalve has a silicon diaphragm and a small piezoelectric actuator to drive It. The controllable gas flow rate is from 0.1 ml/min to 85 ml/min at gas pressure of 0.75 kgf/cm2. The micro pump is a diaphragm type pump which consists of two polysilicon oneway valves and a diaphragm driven by a small piezoelectric actuator. The maximum pumping flow rate and pressure are 20 ¼l/min and 780 mmH20/cm2 respectively.
| Original language | English |
|---|---|
| Title of host publication | Micromechanics and MEMS |
| Subtitle of host publication | Classic and Seminal Papers to 1990 |
| Publisher | John Wiley and Sons Inc. |
| Pages | 444-449 |
| Number of pages | 6 |
| ISBN (Electronic) | 9780470545263 |
| ISBN (Print) | 0780310853, 9780780310858 |
| DOIs | |
| Publication status | Published - 1997 Jan 1 |
| Externally published | Yes |
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ASJC Scopus subject areas
- Computer Science(all)
- Engineering(all)
- Physics and Astronomy(all)
- Energy(all)
Cite this
Normally close microvalve and micropump fabricated on a silicon wafer. / Esashi, Masayoshi; Shoji, Shuichi; Nakano, Akira.
Micromechanics and MEMS: Classic and Seminal Papers to 1990. John Wiley and Sons Inc., 1997. p. 444-449.Research output: Chapter in Book/Report/Conference proceeding › Chapter
}
TY - CHAP
T1 - Normally close microvalve and micropump fabricated on a silicon wafer
AU - Esashi, Masayoshi
AU - Shoji, Shuichi
AU - Nakano, Akira
PY - 1997/1/1
Y1 - 1997/1/1
N2 - A normally close microvalve and micropump were fabricated on a silicon wafer by micromachinlng techniques. Normally close microvalve has a silicon diaphragm and a small piezoelectric actuator to drive It. The controllable gas flow rate is from 0.1 ml/min to 85 ml/min at gas pressure of 0.75 kgf/cm2. The micro pump is a diaphragm type pump which consists of two polysilicon oneway valves and a diaphragm driven by a small piezoelectric actuator. The maximum pumping flow rate and pressure are 20 ¼l/min and 780 mmH20/cm2 respectively.
AB - A normally close microvalve and micropump were fabricated on a silicon wafer by micromachinlng techniques. Normally close microvalve has a silicon diaphragm and a small piezoelectric actuator to drive It. The controllable gas flow rate is from 0.1 ml/min to 85 ml/min at gas pressure of 0.75 kgf/cm2. The micro pump is a diaphragm type pump which consists of two polysilicon oneway valves and a diaphragm driven by a small piezoelectric actuator. The maximum pumping flow rate and pressure are 20 ¼l/min and 780 mmH20/cm2 respectively.
UR - http://www.scopus.com/inward/record.url?scp=0013398497&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=0013398497&partnerID=8YFLogxK
U2 - 10.1109/9780470545263.sect8
DO - 10.1109/9780470545263.sect8
M3 - Chapter
AN - SCOPUS:0013398497
SN - 0780310853
SN - 9780780310858
SP - 444
EP - 449
BT - Micromechanics and MEMS
PB - John Wiley and Sons Inc.
ER -