Abstract
A normally close microvalve and micropump were fabricated on a silicon wafer by micromachinlng techniques. Normally close microvalve has a silicon diaphragm and a small piezoelectric actuator to drive It. The controllable gas flow rate is from 0.1 ml/min to 85 ml/min at gas pressure of 0.75 kgf/cm2. The micro pump is a diaphragm type pump which consists of two polysilicon oneway valves and a diaphragm driven by a small piezoelectric actuator. The maximum pumping flow rate and pressure are 20 ¼l/min and 780 mmH20/cm2 respectively.
Original language | English |
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Title of host publication | Micromechanics and MEMS |
Subtitle of host publication | Classic and Seminal Papers to 1990 |
Publisher | Wiley-IEEE Press |
Pages | 444-449 |
Number of pages | 6 |
ISBN (Electronic) | 9780470545263 |
ISBN (Print) | 0780310853, 9780780310858 |
DOIs | |
Publication status | Published - 1997 Jan 1 |
Externally published | Yes |
ASJC Scopus subject areas
- Computer Science(all)
- Engineering(all)
- Physics and Astronomy(all)
- Energy(all)