Normally close microvalve and micropump fabricated on a silicon wafer

Masayoshi Esashi, Shuichi Shoji, Akira Nakano

Research output: Chapter in Book/Report/Conference proceedingChapter

1 Citation (Scopus)

Abstract

A normally close microvalve and micropump were fabricated on a silicon wafer by micromachinlng techniques. Normally close microvalve has a silicon diaphragm and a small piezoelectric actuator to drive It. The controllable gas flow rate is from 0.1 ml/min to 85 ml/min at gas pressure of 0.75 kgf/cm2. The micro pump is a diaphragm type pump which consists of two polysilicon oneway valves and a diaphragm driven by a small piezoelectric actuator. The maximum pumping flow rate and pressure are 20 ¼l/min and 780 mmH20/cm2 respectively.

Original languageEnglish
Title of host publicationMicromechanics and MEMS
Subtitle of host publicationClassic and Seminal Papers to 1990
PublisherWiley-IEEE Press
Pages444-449
Number of pages6
ISBN (Electronic)9780470545263
ISBN (Print)0780310853, 9780780310858
DOIs
Publication statusPublished - 1997 Jan 1

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ASJC Scopus subject areas

  • Computer Science(all)
  • Engineering(all)
  • Physics and Astronomy(all)
  • Energy(all)

Cite this

Esashi, M., Shoji, S., & Nakano, A. (1997). Normally close microvalve and micropump fabricated on a silicon wafer. In Micromechanics and MEMS: Classic and Seminal Papers to 1990 (pp. 444-449). Wiley-IEEE Press. https://doi.org/10.1109/9780470545263.sect8