Normally closed microvalve and mircopump fabricated on a silicon wafer

Masayoshi Esashi, Shuichi Shoji, Akira Nakano

Research output: Contribution to journalArticle

134 Citations (Scopus)

Abstract

A normally closed microvalve and a micropump are fabricated on a silicon wafer by micro-machining techniques. The normally closed microvalve has a movable silicon diaphragm and a small piezoactuator to drive it. The controllable gas flow rate is from 0.1 ml/min to 85 ml/min at a gas pressure of 0.75 kgf/cm2. The micropump is a diaphragm-type pump, which consists of two polysilicon one-way valves and a diaphragm driven by a small piezoactuator. The maximum pumping flow rate and pressure are 20 μ/min and 780 mmH2O respectively.

Original languageEnglish
Pages (from-to)163-169
Number of pages7
JournalSensors and Actuators
Volume20
Issue number1-2
DOIs
Publication statusPublished - 1989 Nov 15
Externally publishedYes

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Diaphragms
Silicon wafers
Flow rate
Polysilicon
Flow of gases
Machining
Pumps
Silicon
Gases

ASJC Scopus subject areas

  • Engineering(all)

Cite this

Normally closed microvalve and mircopump fabricated on a silicon wafer. / Esashi, Masayoshi; Shoji, Shuichi; Nakano, Akira.

In: Sensors and Actuators, Vol. 20, No. 1-2, 15.11.1989, p. 163-169.

Research output: Contribution to journalArticle

Esashi, Masayoshi ; Shoji, Shuichi ; Nakano, Akira. / Normally closed microvalve and mircopump fabricated on a silicon wafer. In: Sensors and Actuators. 1989 ; Vol. 20, No. 1-2. pp. 163-169.
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