Normally closed microvalve and mircopump fabricated on a silicon wafer

Masayoshi Esashi*, Shuichi Shoji, Akira Nakano

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

141 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Normally closed microvalve and mircopump fabricated on a silicon wafer'. Together they form a unique fingerprint.

Engineering & Materials Science