Notice of Removal: Film growth of c-axis parallel oriented ZnO on entire surface of silica glass pipe for SH-SAW pipe sensor

Yuta Takamura, Shinji Takayanagi, Mami Matsukawa, Chizu Ishida, Takahiko Yanagitani

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

SH-SAW is suitable for liquid sensors to measure conductivity and viscosity because it can propagate without the energy leakage into liquid. We have fabricated a SH-SAW sensor consisting of a c-axis parallel (11-20) oriented ZnO film on a silica glass plate [1]. On the other hand, the long-distance propagation is necessary in order to detect the small changes of the velocity and amplitude. One way to increase propagation distance is wave multiple roundtrips around the sensor. In previous study, the c-axis parallel oriented ZnO film was grown on a part of the glass pipe surface and the SH-BAW roundtrips were demonstrated [2]. However, the SH-SAW roundtrips were not observed because the ZnO film was not grown on the entire surface of the pipe. In this study, we demonstrated the entirepipe-surface deposition of c-axis parallel oriented ZnO film to obtain SH-SAW pipe sensor.

Original languageEnglish
Title of host publication2017 IEEE International Ultrasonics Symposium, IUS 2017
PublisherIEEE Computer Society
ISBN (Electronic)9781538633830
DOIs
Publication statusPublished - 2017 Oct 31
Event2017 IEEE International Ultrasonics Symposium, IUS 2017 - Washington, United States
Duration: 2017 Sep 62017 Sep 9

Publication series

NameIEEE International Ultrasonics Symposium, IUS
Volume0
ISSN (Print)1948-5719
ISSN (Electronic)1948-5727

Other

Other2017 IEEE International Ultrasonics Symposium, IUS 2017
Country/TerritoryUnited States
CityWashington
Period17/9/617/9/9

ASJC Scopus subject areas

  • Acoustics and Ultrasonics

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