Novel process for high-density buried nanopyramid array fabrication by means of dopant ion implantation and wet etching

Meishoku Koh*, Tomomi Goto, Atsushi Sugita, Takashi Tanii, Tomoyuki Iida, Takahiro Shinada, Takashi Matsukawa, Iwao Ohdomari

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

16 Citations (Scopus)

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Engineering & Materials Science

Physics & Astronomy