Nucleation and growth of copper nanoparticles on silicon surfaces

A. Singh, K. Luening, S. Brennan, Takayuki Homma, N. Kubo, P. Pianetta

    Research output: Chapter in Book/Report/Conference proceedingChapter

    3 Citations (Scopus)

    Abstract

    The recent adoption of copper interconnect technology by the semiconductor industry, has led to great interest in understanding the mechanisms of copper metal deposition onto silicon wafer surfaces from ultra pure water (UPW) solutions. We have studied these processes by using total reflection x-ray fluorescence (TXRF) and x-ray absorption near edge spectroscopy (XANES) in a grazing incidence geometry to determine the surface concentration and chemical state of copper atoms on intentionally contaminated Si surfaces. These measurements established that in deoxygenated UPW, copper is deposited on the silicon surface in the form of metallic nanoparticles with sizes up to 16nm. However, in non-deoxygenated UPW, the copper is incorporated uniformly into the silicon surface oxide as Cu oxide.

    Original languageEnglish
    Title of host publicationPhysica Scripta T
    Pages714-716
    Number of pages3
    VolumeT115
    DOIs
    Publication statusPublished - 2005
    Event12th X-ray Absorption Fine Structure International Conference, XAFS12 - Malmo, Sweden
    Duration: 2003 Jun 232003 Jun 27

    Other

    Other12th X-ray Absorption Fine Structure International Conference, XAFS12
    CountrySweden
    CityMalmo
    Period03/6/2303/6/27

    Fingerprint

    nucleation
    copper
    nanoparticles
    silicon
    water
    x ray fluorescence
    oxides
    grazing incidence
    x ray absorption
    industries
    wafers
    geometry
    metals
    spectroscopy
    atoms

    ASJC Scopus subject areas

    • Physics and Astronomy(all)

    Cite this

    Singh, A., Luening, K., Brennan, S., Homma, T., Kubo, N., & Pianetta, P. (2005). Nucleation and growth of copper nanoparticles on silicon surfaces. In Physica Scripta T (Vol. T115, pp. 714-716) https://doi.org/10.1238/Physica.Topical.115a00714

    Nucleation and growth of copper nanoparticles on silicon surfaces. / Singh, A.; Luening, K.; Brennan, S.; Homma, Takayuki; Kubo, N.; Pianetta, P.

    Physica Scripta T. Vol. T115 2005. p. 714-716.

    Research output: Chapter in Book/Report/Conference proceedingChapter

    Singh, A, Luening, K, Brennan, S, Homma, T, Kubo, N & Pianetta, P 2005, Nucleation and growth of copper nanoparticles on silicon surfaces. in Physica Scripta T. vol. T115, pp. 714-716, 12th X-ray Absorption Fine Structure International Conference, XAFS12, Malmo, Sweden, 03/6/23. https://doi.org/10.1238/Physica.Topical.115a00714
    Singh A, Luening K, Brennan S, Homma T, Kubo N, Pianetta P. Nucleation and growth of copper nanoparticles on silicon surfaces. In Physica Scripta T. Vol. T115. 2005. p. 714-716 https://doi.org/10.1238/Physica.Topical.115a00714
    Singh, A. ; Luening, K. ; Brennan, S. ; Homma, Takayuki ; Kubo, N. ; Pianetta, P. / Nucleation and growth of copper nanoparticles on silicon surfaces. Physica Scripta T. Vol. T115 2005. pp. 714-716
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