Nucleation and growth of copper nanoparticles on silicon surfaces

A. Singh, K. Luening, S. Brennan, T. Homma, N. Kubo, P. Pianetta

Research output: Contribution to journalConference article

3 Citations (Scopus)

Abstract

The recent adoption of copper interconnect technology by the semiconductor industry, has led to great interest in understanding the mechanisms of copper metal deposition onto silicon wafer surfaces from ultra pure water (UPW) solutions. We have studied these processes by using total reflection x-ray fluorescence (TXRF) and x-ray absorption near edge spectroscopy (XANES) in a grazing incidence geometry to determine the surface concentration and chemical state of copper atoms on intentionally contaminated Si surfaces. These measurements established that in deoxygenated UPW, copper is deposited on the silicon surface in the form of metallic nanoparticles with sizes up to 16nm. However, in non-deoxygenated UPW, the copper is incorporated uniformly into the silicon surface oxide as Cu oxide.

Original languageEnglish
Pages (from-to)714-716
Number of pages3
JournalPhysica Scripta T
VolumeT115
DOIs
Publication statusPublished - 2005 Dec 1
Event12th X-ray Absorption Fine Structure International Conference, XAFS12 - Malmo, Sweden
Duration: 2003 Jun 232003 Jun 27

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics
  • Mathematical Physics
  • Condensed Matter Physics

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