Oblique incidence ultrasonic reflectometry device based on c-axis tilted ScAlN films for evaluating viscoelastic properties of liquids above 100 MHz

Sarina Kinoshita, Takahiko Yanagitani*

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

Abstract

The ultrasonic complex reflectometry is a powerful tool for evaluating the viscoelastic properties of small liquid samples. However, the shear mode reflectometry device has not been used at frequencies above 100 MHz because shear-mode piezoelectric films are difficult to obtain at such frequencies. Here, the oblique incidence reflectometry with 143 MHz quasi-shear waves excited by c-axis tilted ScAlN thin films was proposed to realize high-sensitivity evaluation of the viscoelastic properties of liquids. Using the prism type reflectometry MEMS, the shear elasticity and shear viscosity of glycerin solutions were estimated from their complex reflection coefficients.

Original languageEnglish
Article number152901
JournalApplied Physics Letters
Volume121
Issue number15
DOIs
Publication statusPublished - 2022 Oct 10

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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