@inproceedings{15a9ae3206c54f1f81bb4152f3e9f0fc,
title = "Observation of a sputtered Si surface irradiated by metal cluster complex ions",
author = "Y. Teranishi and K. Kondou and Y. Fujiwara and H. Nonaka and K. Yamamoto and T. Fujimoto and S. Ichimura",
year = "2005",
month = jan,
day = "1",
doi = "10.1109/imnc.2005.203780",
language = "English",
isbn = "4990247221",
series = "Digest of Papers - Microprocesses and Nanotechnology 2005: 2005 International Microprocesses and Nanotechnology Conference",
publisher = "IEEE Computer Society",
pages = "146--147",
booktitle = "Digest of Papers - Microprocesses and Nanotechnology 2005",
note = "2005 International Microprocesses and Nanotechnology Conference ; Conference date: 25-10-2005 Through 28-10-2005",
}