Observation of a sputtered Si surface irradiated by metal cluster complex ions

Y. Teranishi*, K. Kondou, Y. Fujiwara, H. Nonaka, K. Yamamoto, T. Fujimoto, S. Ichimura

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Original languageEnglish
Title of host publicationDigest of Papers - Microprocesses and Nanotechnology 2005
Subtitle of host publication2005 International Microprocesses and Nanotechnology Conference
PublisherIEEE Computer Society
Pages146-147
Number of pages2
ISBN (Print)4990247221, 9784990247225
DOIs
Publication statusPublished - 2005 Jan 1
Externally publishedYes
Event2005 International Microprocesses and Nanotechnology Conference - Tokyo, Japan
Duration: 2005 Oct 252005 Oct 28

Publication series

NameDigest of Papers - Microprocesses and Nanotechnology 2005: 2005 International Microprocesses and Nanotechnology Conference
Volume2005

Conference

Conference2005 International Microprocesses and Nanotechnology Conference
Country/TerritoryJapan
CityTokyo
Period05/10/2505/10/28

ASJC Scopus subject areas

  • Engineering(all)

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