Observation of a sputtered Si surface irradiated by metal cluster complex ions

Y. Teranishi, K. Kondou, Y. Fujiwara, H. Nonaka, K. Yamamoto, T. Fujimoto, Shingo Ichimura

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Original languageEnglish
Title of host publicationDigest of Papers - Microprocesses and Nanotechnology 2005
Subtitle of host publication2005 International Microprocesses and Nanotechnology Conference
Pages146-147
Number of pages2
Volume2005
Publication statusPublished - 2005 Dec 1
Externally publishedYes
Event2005 International Microprocesses and Nanotechnology Conference - Tokyo
Duration: 2005 Oct 252005 Oct 28

Other

Other2005 International Microprocesses and Nanotechnology Conference
CityTokyo
Period05/10/2505/10/28

ASJC Scopus subject areas

  • Engineering(all)

Cite this

Teranishi, Y., Kondou, K., Fujiwara, Y., Nonaka, H., Yamamoto, K., Fujimoto, T., & Ichimura, S. (2005). Observation of a sputtered Si surface irradiated by metal cluster complex ions. In Digest of Papers - Microprocesses and Nanotechnology 2005: 2005 International Microprocesses and Nanotechnology Conference (Vol. 2005, pp. 146-147). [1595256]