| Original language | English |
|---|---|
| Title of host publication | Digest of Papers - Microprocesses and Nanotechnology 2005 |
| Subtitle of host publication | 2005 International Microprocesses and Nanotechnology Conference |
| Pages | 146-147 |
| Number of pages | 2 |
| Volume | 2005 |
| Publication status | Published - 2005 Dec 1 |
| Externally published | Yes |
| Event | 2005 International Microprocesses and Nanotechnology Conference - Tokyo Duration: 2005 Oct 25 → 2005 Oct 28 |
Other
| Other | 2005 International Microprocesses and Nanotechnology Conference |
|---|---|
| City | Tokyo |
| Period | 05/10/25 → 05/10/28 |
ASJC Scopus subject areas
- Engineering(all)
Cite this
Teranishi, Y., Kondou, K., Fujiwara, Y., Nonaka, H., Yamamoto, K., Fujimoto, T., & Ichimura, S. (2005). Observation of a sputtered Si surface irradiated by metal cluster complex ions. In Digest of Papers - Microprocesses and Nanotechnology 2005: 2005 International Microprocesses and Nanotechnology Conference (Vol. 2005, pp. 146-147). [1595256]