Observation of a sputtered Si surface irradiated by metal cluster complex ions

Y. Teranishi; K. Kondou; Y. Fujiwara; H. Nonaka; K. Yamamoto; T. Fujimoto; S. Ichimura

doi:10.1109/imnc.2005.203780

Observation of a sputtered Si surface irradiated by metal cluster complex ions

Y. Teranishi, K. Kondou, Y. Fujiwara, H. Nonaka, K. Yamamoto, T. Fujimoto, S. Ichimura

Research Innovation Center

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Original language	English
Title of host publication	Digest of Papers - Microprocesses and Nanotechnology 2005
Subtitle of host publication	2005 International Microprocesses and Nanotechnology Conference
Publisher	IEEE Computer Society
Pages	146-147
Number of pages	2
ISBN (Print)	4990247221, 9784990247225
DOIs	https://doi.org/10.1109/imnc.2005.203780
Publication status	Published - 2005 Jan 1
Event	2005 International Microprocesses and Nanotechnology Conference - Tokyo, Japan Duration: 2005 Oct 25 → 2005 Oct 28

Publication series

Name	Digest of Papers - Microprocesses and Nanotechnology 2005: 2005 International Microprocesses and Nanotechnology Conference
Volume	2005

Conference

Conference	2005 International Microprocesses and Nanotechnology Conference
Country	Japan
City	Tokyo
Period	05/10/25 → 05/10/28

ASJC Scopus subject areas

Engineering(all)

Access to Document

10.1109/imnc.2005.203780

Cite this

Teranishi, Y., Kondou, K., Fujiwara, Y., Nonaka, H., Yamamoto, K., Fujimoto, T., & Ichimura, S. (2005). Observation of a sputtered Si surface irradiated by metal cluster complex ions. In Digest of Papers - Microprocesses and Nanotechnology 2005: 2005 International Microprocesses and Nanotechnology Conference (pp. 146-147). [1595256] (Digest of Papers - Microprocesses and Nanotechnology 2005: 2005 International Microprocesses and Nanotechnology Conference; Vol. 2005). IEEE Computer Society. https://doi.org/10.1109/imnc.2005.203780

Observation of a sputtered Si surface irradiated by metal cluster complex ions. / Teranishi, Y.; Kondou, K.; Fujiwara, Y.; Nonaka, H.; Yamamoto, K.; Fujimoto, T.; Ichimura, S.

Digest of Papers - Microprocesses and Nanotechnology 2005: 2005 International Microprocesses and Nanotechnology Conference. IEEE Computer Society, 2005. p. 146-147 1595256 (Digest of Papers - Microprocesses and Nanotechnology 2005: 2005 International Microprocesses and Nanotechnology Conference; Vol. 2005).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Teranishi, Y, Kondou, K, Fujiwara, Y, Nonaka, H, Yamamoto, K, Fujimoto, T & Ichimura, S 2005, Observation of a sputtered Si surface irradiated by metal cluster complex ions. in Digest of Papers - Microprocesses and Nanotechnology 2005: 2005 International Microprocesses and Nanotechnology Conference., 1595256, Digest of Papers - Microprocesses and Nanotechnology 2005: 2005 International Microprocesses and Nanotechnology Conference, vol. 2005, IEEE Computer Society, pp. 146-147, 2005 International Microprocesses and Nanotechnology Conference, Tokyo, Japan, 05/10/25. https://doi.org/10.1109/imnc.2005.203780

Teranishi Y, Kondou K, Fujiwara Y, Nonaka H, Yamamoto K, Fujimoto T et al. Observation of a sputtered Si surface irradiated by metal cluster complex ions. In Digest of Papers - Microprocesses and Nanotechnology 2005: 2005 International Microprocesses and Nanotechnology Conference. IEEE Computer Society. 2005. p. 146-147. 1595256. (Digest of Papers - Microprocesses and Nanotechnology 2005: 2005 International Microprocesses and Nanotechnology Conference). https://doi.org/10.1109/imnc.2005.203780

Teranishi, Y. ; Kondou, K. ; Fujiwara, Y. ; Nonaka, H. ; Yamamoto, K. ; Fujimoto, T. ; Ichimura, S. / Observation of a sputtered Si surface irradiated by metal cluster complex ions. Digest of Papers - Microprocesses and Nanotechnology 2005: 2005 International Microprocesses and Nanotechnology Conference. IEEE Computer Society, 2005. pp. 146-147 (Digest of Papers - Microprocesses and Nanotechnology 2005: 2005 International Microprocesses and Nanotechnology Conference).

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