Observation of a sputtered Si surface irradiated by metal cluster complex ions

Y. Teranishi, K. Kondou, Y. Fujiwara, H. Nonaka, K. Yamamoto, T. Fujimoto, S. Ichimura

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Fingerprint Dive into the research topics of 'Observation of a sputtered Si surface irradiated by metal cluster complex ions'. Together they form a unique fingerprint.