Observation of electron beam damage in thin-film SiO2 on Si with scanning Auger electron microscope

S. Ichimura; R. Shimizu

doi:10.1063/1.326677

Observation of electron beam damage in thin-film SiO₂ on Si with scanning Auger electron microscope

S. Ichimura^*, R. Shimizu

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

26 Citations (Scopus)

Abstract

Electron beam damage to thin-film SiO₂ was observed with a scanning Auger electron microscope. After a certain degree of electron beam exposure, changes in both the surface topography and chemical composition were investigated. The result suggested that there is a close relationship between the beam damage and the dissipation of incident energy in thin-film SiO ₂.

Original language	English
Pages (from-to)	6020-6022
Number of pages	3
Journal	Journal of Applied Physics
Volume	50
Issue number	9
DOIs	https://doi.org/10.1063/1.326677
Publication status	Published - 1979
Externally published	Yes

ASJC Scopus subject areas

Physics and Astronomy(all)

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title = "Observation of electron beam damage in thin-film SiO2 on Si with scanning Auger electron microscope",

abstract = "Electron beam damage to thin-film SiO2 was observed with a scanning Auger electron microscope. After a certain degree of electron beam exposure, changes in both the surface topography and chemical composition were investigated. The result suggested that there is a close relationship between the beam damage and the dissipation of incident energy in thin-film SiO 2.",

author = "S. Ichimura and R. Shimizu",

year = "1979",

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AU - Ichimura, S.

AU - Shimizu, R.

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AB - Electron beam damage to thin-film SiO2 was observed with a scanning Auger electron microscope. After a certain degree of electron beam exposure, changes in both the surface topography and chemical composition were investigated. The result suggested that there is a close relationship between the beam damage and the dissipation of incident energy in thin-film SiO 2.

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JF - Journal of Applied Physics

SN - 0021-8979

IS - 9

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Observation of electron beam damage in thin-film SiO₂ on Si with scanning Auger electron microscope

Abstract

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