Observation of Ferroelectricity in Very Thin Vinylidene Fluoride Trifluoroethylene Copolymer[P(VDF·TrFE)] Films by High Frequency C-V Measurements of Al-SiO2-P(VDF·TrFE)-SiO2-Si Capacitors

Noriyoshi Yamauchi; Kinya Kato; Tsutomu Wada

doi:10.1143/JJAP.23.L671

Observation of Ferroelectricity in Very Thin Vinylidene Fluoride Trifluoroethylene Copolymer[P(VDF·TrFE)] Films by High Frequency C-V Measurements of Al-SiO₂-P(VDF·TrFE)-SiO₂-Si Capacitors

Noriyoshi Yamauchi, Kinya Kato, Tsutomu Wada

Research output: Contribution to journal › Article › peer-review

15 Citations (Scopus)

Abstract

MIS capacitors with Al–SiO₂–P(VDF·TrFE)–SiO₂–Si structure were fabricated depositing P(VDF·TrFE) film by a spin coating method to investigate properties of very thin ferroelectric polymer films. By sand wiching the polymer film with SiO₂ films, application of an electrical field high enough for ferroelectricity measurement in several tens nm thick P(VDF·TrFE) films became possible. It is revealed that P(VDF·TrFE) film as thin as 32nm shows ferroelectricity by high frequency C-V measurements of the capacitors.

Original language	English
Pages (from-to)	L671-L673
Journal	Japanese journal of applied physics
Volume	23
Issue number	9
DOIs	https://doi.org/10.1143/JJAP.23.L671
Publication status	Published - 1984 Sep
Externally published	Yes

ASJC Scopus subject areas

Engineering(all)
Physics and Astronomy(all)

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Observation of Ferroelectricity in Very Thin Vinylidene Fluoride Trifluoroethylene Copolymer[P(VDF·TrFE)] Films by High Frequency C-V Measurements of Al-SiO₂-P(VDF·TrFE)-SiO₂-Si Capacitors. / Yamauchi, Noriyoshi; Kato, Kinya; Wada, Tsutomu.

In: Japanese journal of applied physics, Vol. 23, No. 9, 09.1984, p. L671-L673.

Research output: Contribution to journal › Article › peer-review

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