Observation of Ferroelectricity in Very Thin Vinylidene Fluoride Trifluoroethylene Copolymer[P(VDF·TrFE)] Films by High Frequency C-V Measurements of Al-SiO2-P(VDF·TrFE)-SiO2-Si Capacitors

Noriyoshi Yamauchi, Kinya Kato, Tsutomu Wada

Research output: Contribution to journalArticle

15 Citations (Scopus)

Abstract

MIS capacitors with Al–SiO2–P(VDF·TrFE)–SiO2–Si structure were fabricated depositing P(VDF·TrFE) film by a spin coating method to investigate properties of very thin ferroelectric polymer films. By sand wiching the polymer film with SiO2 films, application of an electrical field high enough for ferroelectricity measurement in several tens nm thick P(VDF·TrFE) films became possible. It is revealed that P(VDF·TrFE) film as thin as 32nm shows ferroelectricity by high frequency C-V measurements of the capacitors.

Original languageEnglish
Pages (from-to)L671-L673
JournalJapanese journal of applied physics
Volume23
Issue number9
DOIs
Publication statusPublished - 1984 Sep
Externally publishedYes

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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