Abstract
MIS capacitors with Al–SiO2–P(VDF·TrFE)–SiO2–Si structure were fabricated depositing P(VDF·TrFE) film by a spin coating method to investigate properties of very thin ferroelectric polymer films. By sand wiching the polymer film with SiO2 films, application of an electrical field high enough for ferroelectricity measurement in several tens nm thick P(VDF·TrFE) films became possible. It is revealed that P(VDF·TrFE) film as thin as 32nm shows ferroelectricity by high frequency C-V measurements of the capacitors.
| Original language | English |
|---|---|
| Pages (from-to) | L671-L673 |
| Journal | Japanese journal of applied physics |
| Volume | 23 |
| Issue number | 9 |
| DOIs | |
| Publication status | Published - 1984 Sep |
| Externally published | Yes |
ASJC Scopus subject areas
- Engineering(all)
- Physics and Astronomy(all)
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Yamauchi, N., Kato, K., & Wada, T. (1984). Observation of Ferroelectricity in Very Thin Vinylidene Fluoride Trifluoroethylene Copolymer[P(VDF·TrFE)] Films by High Frequency C-V Measurements of Al-SiO2-P(VDF·TrFE)-SiO2-Si Capacitors. Japanese journal of applied physics, 23(9), L671-L673. https://doi.org/10.1143/JJAP.23.L671