Observation of Si surface with instrument for electron spectroscopic tomography

Akira Kurokawa, Shingo Ichimura

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)177-179
Number of pages3
JournalShinku/Journal of the Vacuum Society of Japan
Volume40
Issue number3
DOIs
Publication statusPublished - 1997 Jan 1
Externally publishedYes

Fingerprint

Tomography
tomography
Electrons
electrons

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering

Cite this

Observation of Si surface with instrument for electron spectroscopic tomography. / Kurokawa, Akira; Ichimura, Shingo.

In: Shinku/Journal of the Vacuum Society of Japan, Vol. 40, No. 3, 01.01.1997, p. 177-179.

Research output: Contribution to journalArticle

@article{7bc03546cb164b799e161937d99330d3,
title = "Observation of Si surface with instrument for electron spectroscopic tomography",
author = "Akira Kurokawa and Shingo Ichimura",
year = "1997",
month = "1",
day = "1",
doi = "10.3131/jvsj.40.177",
language = "English",
volume = "40",
pages = "177--179",
journal = "Journal of the Vacuum Society of Japan",
issn = "1882-2398",
publisher = "Vacuum Society of Japan",
number = "3",

}

TY - JOUR

T1 - Observation of Si surface with instrument for electron spectroscopic tomography

AU - Kurokawa, Akira

AU - Ichimura, Shingo

PY - 1997/1/1

Y1 - 1997/1/1

UR - http://www.scopus.com/inward/record.url?scp=5744244566&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=5744244566&partnerID=8YFLogxK

U2 - 10.3131/jvsj.40.177

DO - 10.3131/jvsj.40.177

M3 - Article

AN - SCOPUS:5744244566

VL - 40

SP - 177

EP - 179

JO - Journal of the Vacuum Society of Japan

JF - Journal of the Vacuum Society of Japan

SN - 1882-2398

IS - 3

ER -