Observation of Si surface with instrument for electron spectroscopic tomography

Akira Kurokawa*, Shingo Ichimura

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Pages (from-to)177-179
Number of pages3
JournalShinku/Journal of the Vacuum Society of Japan
Volume40
Issue number3
DOIs
Publication statusPublished - 1997
Externally publishedYes

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering

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